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The fabrication of dense and uniform InAs nanowire arrays

Persson, A. I.; Fröberg, Linus LU ; Samuelson, Lars LU and Linke, Heiner LU (2009) In Nanotechnology 20(22).
Abstract
Nanowires are important candidates for use in future electronics, photonics and thermoelectrics applications. We focus here in particular on nanowires for use in thermoelectric power generation and present a method of fabricating dense uniform InAs nanowire arrays amenable to future incorporation of advanced heterostructures that could further increase the thermoelectric performance of these nanowires. In these applications it will be important to have the nanowires densely packed in order to give an appreciable amount of power output. Here we present the fabrication of such dense arrays, using metal-particle seeded growth and chemical beam epitaxy, where the metal particles are defined by electron beam lithography, metal evaporation and... (More)
Nanowires are important candidates for use in future electronics, photonics and thermoelectrics applications. We focus here in particular on nanowires for use in thermoelectric power generation and present a method of fabricating dense uniform InAs nanowire arrays amenable to future incorporation of advanced heterostructures that could further increase the thermoelectric performance of these nanowires. In these applications it will be important to have the nanowires densely packed in order to give an appreciable amount of power output. Here we present the fabrication of such dense arrays, using metal-particle seeded growth and chemical beam epitaxy, where the metal particles are defined by electron beam lithography, metal evaporation and lift-off. We evaluate the potential of chemical beam epitaxy for the growth of dense, freestanding InAs nanowire arrays and describe the process that enabled us to achieve areal packing densities of up to 19% with a variation of only a few per cent in nanowire diameter and height. We close by discussing how even higher areal packing densities can be achieved. (Less)
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Nanotechnology
volume
20
issue
22
publisher
IOP Publishing
external identifiers
  • wos:000266045200014
  • scopus:67649191550
ISSN
0957-4484
DOI
10.1088/0957-4484/20/22/225304
language
English
LU publication?
yes
id
aa68f17f-c4d5-428e-8fa5-fe4cfc361411 (old id 1425881)
date added to LUP
2009-06-26 14:45:07
date last changed
2017-02-26 03:41:57
@article{aa68f17f-c4d5-428e-8fa5-fe4cfc361411,
  abstract     = {Nanowires are important candidates for use in future electronics, photonics and thermoelectrics applications. We focus here in particular on nanowires for use in thermoelectric power generation and present a method of fabricating dense uniform InAs nanowire arrays amenable to future incorporation of advanced heterostructures that could further increase the thermoelectric performance of these nanowires. In these applications it will be important to have the nanowires densely packed in order to give an appreciable amount of power output. Here we present the fabrication of such dense arrays, using metal-particle seeded growth and chemical beam epitaxy, where the metal particles are defined by electron beam lithography, metal evaporation and lift-off. We evaluate the potential of chemical beam epitaxy for the growth of dense, freestanding InAs nanowire arrays and describe the process that enabled us to achieve areal packing densities of up to 19% with a variation of only a few per cent in nanowire diameter and height. We close by discussing how even higher areal packing densities can be achieved.},
  articleno    = {225304},
  author       = {Persson, A. I. and Fröberg, Linus and Samuelson, Lars and Linke, Heiner},
  issn         = {0957-4484},
  language     = {eng},
  number       = {22},
  publisher    = {IOP Publishing},
  series       = {Nanotechnology},
  title        = {The fabrication of dense and uniform InAs nanowire arrays},
  url          = {http://dx.doi.org/10.1088/0957-4484/20/22/225304},
  volume       = {20},
  year         = {2009},
}