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Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays

Guan, Zhi-Qiang; Luo, Gang LU ; Montelius, Lars LU and Xu, Hongxing LU (2010) In Chinese Physics Letters 27(2).
Abstract
Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The "pull-in" effect in dc driving and the "hard spring effect" in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high.. factor. The mass-spring lump model combined with Green's function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for... (More)
Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The "pull-in" effect in dc driving and the "hard spring effect" in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high.. factor. The mass-spring lump model combined with Green's function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for guiding the geometrical design of cantilever-based sensors. (Less)
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Chinese Physics Letters
volume
27
issue
2
publisher
IOP Publishing
external identifiers
  • wos:000274360800086
  • scopus:77049119940
ISSN
1741-3540
DOI
10.1088/0256-307X/27/2/028503
language
English
LU publication?
yes
id
a86b5e14-ff83-4ee3-b13a-554c7c8d098d (old id 1571102)
date added to LUP
2010-03-16 15:08:39
date last changed
2018-05-29 12:14:10
@article{a86b5e14-ff83-4ee3-b13a-554c7c8d098d,
  abstract     = {Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The "pull-in" effect in dc driving and the "hard spring effect" in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high.. factor. The mass-spring lump model combined with Green's function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for guiding the geometrical design of cantilever-based sensors.},
  articleno    = {028503},
  author       = {Guan, Zhi-Qiang and Luo, Gang and Montelius, Lars and Xu, Hongxing},
  issn         = {1741-3540},
  language     = {eng},
  number       = {2},
  publisher    = {IOP Publishing},
  series       = {Chinese Physics Letters},
  title        = {Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays},
  url          = {http://dx.doi.org/10.1088/0256-307X/27/2/028503},
  volume       = {27},
  year         = {2010},
}