Skip to main content

Lund University Publications

LUND UNIVERSITY LIBRARIES

Pulsed laser deposited transparent and conductive V-doped ZnO thin films

Smaali, A. ; Abdelli-Messaci, S. ; Lafane, S. ; Mavlonov, A. ; Lenzner, J. ; Richter, S. LU ; Kechouane, M. ; Nemraoui, O. and Ellmer, K. (2020) In Thin Solid Films 700.
Abstract

ZnO and vanadium-doped ZnO (0.7–4.1 at.%) thin films were deposited onto corning glass substrates by the pulsed laser deposition technique using a KrF excimer laser (λ = 248 nm). The films were deposited at 500 °C under an oxygen pressure of 1 Pa with a laser fluence of 2 J/cm2. The structural, morphological, optical and electrical properties as a function of the dopant atomic concentration were investigated by means of X-ray diffraction, Scanning Electron Microscopy, spectrophotometry, conductivity and Hall measurements. All the doped and undoped films show a preferential orientation along the c-axis with a deterioration at higher doping levels (>4 at. %). Besides, as the doping amount increases the in-plane stress leads... (More)

ZnO and vanadium-doped ZnO (0.7–4.1 at.%) thin films were deposited onto corning glass substrates by the pulsed laser deposition technique using a KrF excimer laser (λ = 248 nm). The films were deposited at 500 °C under an oxygen pressure of 1 Pa with a laser fluence of 2 J/cm2. The structural, morphological, optical and electrical properties as a function of the dopant atomic concentration were investigated by means of X-ray diffraction, Scanning Electron Microscopy, spectrophotometry, conductivity and Hall measurements. All the doped and undoped films show a preferential orientation along the c-axis with a deterioration at higher doping levels (>4 at. %). Besides, as the doping amount increases the in-plane stress leads to an increase of the c-axis lattice parameter. The films are transparent within the wavelength range 400–1200 nm. The electrical resistivity of the films drops from 8.2 10−3 to 1.3 10−3 Ω cm with an increase in the dopant concentration up to 0.9 at. % and then rises as the dopant level is increased further.

(Less)
Please use this url to cite or link to this publication:
author
; ; ; ; ; ; ; and
publishing date
type
Contribution to journal
publication status
published
keywords
Electrical properties, Optical properties, Pulsed laser deposition, Thin films, Transparent conducting oxides, Vanadium-doped zinc oxide
in
Thin Solid Films
volume
700
article number
137892
publisher
Elsevier
external identifiers
  • scopus:85081133986
ISSN
0040-6090
DOI
10.1016/j.tsf.2020.137892
language
English
LU publication?
no
additional info
Publisher Copyright: © 2020 Elsevier B.V.
id
19c63de1-d50c-415f-9478-346ed8efa84a
date added to LUP
2022-04-19 14:43:38
date last changed
2022-04-29 11:27:05
@article{19c63de1-d50c-415f-9478-346ed8efa84a,
  abstract     = {{<p>ZnO and vanadium-doped ZnO (0.7–4.1 at.%) thin films were deposited onto corning glass substrates by the pulsed laser deposition technique using a KrF excimer laser (λ = 248 nm). The films were deposited at 500 °C under an oxygen pressure of 1 Pa with a laser fluence of 2 J/cm<sup>2</sup>. The structural, morphological, optical and electrical properties as a function of the dopant atomic concentration were investigated by means of X-ray diffraction, Scanning Electron Microscopy, spectrophotometry, conductivity and Hall measurements. All the doped and undoped films show a preferential orientation along the c-axis with a deterioration at higher doping levels (&gt;4 at. %). Besides, as the doping amount increases the in-plane stress leads to an increase of the c-axis lattice parameter. The films are transparent within the wavelength range 400–1200 nm. The electrical resistivity of the films drops from 8.2 10<sup>−3</sup> to 1.3 10<sup>−3</sup> Ω cm with an increase in the dopant concentration up to 0.9 at. % and then rises as the dopant level is increased further.</p>}},
  author       = {{Smaali, A. and Abdelli-Messaci, S. and Lafane, S. and Mavlonov, A. and Lenzner, J. and Richter, S. and Kechouane, M. and Nemraoui, O. and Ellmer, K.}},
  issn         = {{0040-6090}},
  keywords     = {{Electrical properties; Optical properties; Pulsed laser deposition; Thin films; Transparent conducting oxides; Vanadium-doped zinc oxide}},
  language     = {{eng}},
  month        = {{04}},
  publisher    = {{Elsevier}},
  series       = {{Thin Solid Films}},
  title        = {{Pulsed laser deposited transparent and conductive V-doped ZnO thin films}},
  url          = {{http://dx.doi.org/10.1016/j.tsf.2020.137892}},
  doi          = {{10.1016/j.tsf.2020.137892}},
  volume       = {{700}},
  year         = {{2020}},
}