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Characterization of micromachined ultrasonic transducers using light diffraction tomography

Almqvist, Monica LU ; Törndahl, Marcus LU ; Nilsson, M and Lilliehorn, T (2005) In IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 52(12). p.2298-2302
Abstract
This paper demonstrates that light diffraction tomography can be used to measure the acoustic field of micromachined ultrasonic transducers (MUT) in cases in which standard methods like hydrophone and microphone measurements fail. Two types of MUTs have been characterized with the method, one air-coupled capacitive MUT (cMUT) and one waterloaded continuous wave (CW) miniature multilayer lead zirconate titanate (PZT) transducer. Light diffraction tomography is an ultrasound measurement method with some special characteristics. Based on the interaction of light and ultrasound, it combines light intensity measurements with tomography algorithms to produce a measurement system. The method offers nonperturbing pressure measurements with high... (More)
This paper demonstrates that light diffraction tomography can be used to measure the acoustic field of micromachined ultrasonic transducers (MUT) in cases in which standard methods like hydrophone and microphone measurements fail. Two types of MUTs have been characterized with the method, one air-coupled capacitive MUT (cMUT) and one waterloaded continuous wave (CW) miniature multilayer lead zirconate titanate (PZT) transducer. Light diffraction tomography is an ultrasound measurement method with some special characteristics. Based on the interaction of light and ultrasound, it combines light intensity measurements with tomography algorithms to produce a measurement system. The method offers nonperturbing pressure measurements with high spatial resolution. It has been shown that, under certain circumstances, light diffraction tomography can be used as an absolute pressure measurement method with accuracy in the order of 10% in water and 13% in air. The results show that air-coupled cMUTs in the frequency range of about 1 MHz as well as the extreme near field of a miniaturized CW 10 MHz waterloaded transducer were successfully characterized with light diffraction tomography. (Less)
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author
organization
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Contribution to journal
publication status
published
subject
in
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
volume
52
issue
12
pages
2298 - 2302
publisher
IEEE--Institute of Electrical and Electronics Engineers Inc.
external identifiers
  • pmid:16463495
  • wos:000234398700014
  • scopus:33644857664
ISSN
0885-3010
DOI
10.1109/TUFFC.2005.1563272
language
English
LU publication?
yes
id
087387ce-1ecb-471c-9981-82fc9014d3bb (old id 210231)
alternative location
http://ieeexplore.ieee.org/iel5/58/33178/01563272.pdf
date added to LUP
2007-08-07 10:48:03
date last changed
2017-01-01 04:48:41
@article{087387ce-1ecb-471c-9981-82fc9014d3bb,
  abstract     = {This paper demonstrates that light diffraction tomography can be used to measure the acoustic field of micromachined ultrasonic transducers (MUT) in cases in which standard methods like hydrophone and microphone measurements fail. Two types of MUTs have been characterized with the method, one air-coupled capacitive MUT (cMUT) and one waterloaded continuous wave (CW) miniature multilayer lead zirconate titanate (PZT) transducer. Light diffraction tomography is an ultrasound measurement method with some special characteristics. Based on the interaction of light and ultrasound, it combines light intensity measurements with tomography algorithms to produce a measurement system. The method offers nonperturbing pressure measurements with high spatial resolution. It has been shown that, under certain circumstances, light diffraction tomography can be used as an absolute pressure measurement method with accuracy in the order of 10% in water and 13% in air. The results show that air-coupled cMUTs in the frequency range of about 1 MHz as well as the extreme near field of a miniaturized CW 10 MHz waterloaded transducer were successfully characterized with light diffraction tomography.},
  author       = {Almqvist, Monica and Törndahl, Marcus and Nilsson, M and Lilliehorn, T},
  issn         = {0885-3010},
  language     = {eng},
  number       = {12},
  pages        = {2298--2302},
  publisher    = {IEEE--Institute of Electrical and Electronics Engineers Inc.},
  series       = {IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  title        = {Characterization of micromachined ultrasonic transducers using light diffraction tomography},
  url          = {http://dx.doi.org/10.1109/TUFFC.2005.1563272},
  volume       = {52},
  year         = {2005},
}