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Calibration factor for determination of interstitial oxygen concentration in germanium by infrared absorption

Litvinov, V V; Svensson, B G; Murin, L I; Lindström, Lennart LU and Markevich, V P (2005) In Solid State Phenomena 108-109. p.735-740
Abstract
Intensities of infrared absorption due to asymmetric stretching vibrations of interstitial oxygen atoms in Ge crystals enriched with O-16 and O-18 isotopes have been compared with oxygen concentrations determined by means of secondary ion mass spectrometry (SIMS). For Ge samples with oxygen content less than 510(17) cm(-3) a good correlation has been found between the values of oxygen concentration and values of absorption coefficient in maximum of the absorption band at 855.6 cm(-1) with a proportionality coefficient C-O = 0.95 10(17) cm(-2). It is argued that kinetics of oxygen-related thermal double donor formation and oxygen loss upon heat-treatments of Ge crystals at 350 degrees C cannot be described properly with the application of... (More)
Intensities of infrared absorption due to asymmetric stretching vibrations of interstitial oxygen atoms in Ge crystals enriched with O-16 and O-18 isotopes have been compared with oxygen concentrations determined by means of secondary ion mass spectrometry (SIMS). For Ge samples with oxygen content less than 510(17) cm(-3) a good correlation has been found between the values of oxygen concentration and values of absorption coefficient in maximum of the absorption band at 855.6 cm(-1) with a proportionality coefficient C-O = 0.95 10(17) cm(-2). It is argued that kinetics of oxygen-related thermal double donor formation and oxygen loss upon heat-treatments of Ge crystals at 350 degrees C cannot be described properly with the application of calibration coefficient C-O 510(16) cm(-2), which is widely used for the determination of oxygen concentration in Ge crystals. (Less)
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
SIMS, oxygen, germanium, infrared absorption
in
Solid State Phenomena
volume
108-109
pages
735 - 740
publisher
Trans Tech Publications Ltd
external identifiers
  • wos:000234198300117
  • scopus:33744525332
ISSN
1012-0394
language
English
LU publication?
yes
id
f3e64799-33c3-4d2a-bec8-e0a4142cfada (old id 210276)
date added to LUP
2007-08-07 15:44:47
date last changed
2017-01-01 06:41:30
@article{f3e64799-33c3-4d2a-bec8-e0a4142cfada,
  abstract     = {Intensities of infrared absorption due to asymmetric stretching vibrations of interstitial oxygen atoms in Ge crystals enriched with O-16 and O-18 isotopes have been compared with oxygen concentrations determined by means of secondary ion mass spectrometry (SIMS). For Ge samples with oxygen content less than 510(17) cm(-3) a good correlation has been found between the values of oxygen concentration and values of absorption coefficient in maximum of the absorption band at 855.6 cm(-1) with a proportionality coefficient C-O = 0.95 10(17) cm(-2). It is argued that kinetics of oxygen-related thermal double donor formation and oxygen loss upon heat-treatments of Ge crystals at 350 degrees C cannot be described properly with the application of calibration coefficient C-O 510(16) cm(-2), which is widely used for the determination of oxygen concentration in Ge crystals.},
  author       = {Litvinov, V V and Svensson, B G and Murin, L I and Lindström, Lennart and Markevich, V P},
  issn         = {1012-0394},
  keyword      = {SIMS,oxygen,germanium,infrared absorption},
  language     = {eng},
  pages        = {735--740},
  publisher    = {Trans Tech Publications Ltd},
  series       = {Solid State Phenomena},
  title        = {Calibration factor for determination of interstitial oxygen concentration in germanium by infrared absorption},
  volume       = {108-109},
  year         = {2005},
}