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Single-crystalline tungsten nanoparticles produced by thermal decomposition of tungsten hexacarbonyl

Magnusson, Martin H. LU ; Deppert, Knut LU and Malm, Jan Olle LU (2000) In Journal of Materials Research 15(7). p.1564-1569
Abstract

Nanometer-sized particles of W are of interest in semiconductor device research, where such particles may store electrons inside heteroepitaxially defined structures. In this paper, we present results concerning W particles produced by thermal decomposition of tungsten hexacarbonyl. By the described method, it was possible to produce size-selected, single-crystalline W particles in the size range between 15 and 60 nm. The sintering behavior of the particles was studied between ambient temperatures and 1900 °C. The particle morphology and structure were examined with high-resolution transmission electron microscopy and electron diffraction techniques. Particles sintered at the highest temperatures typically were single crystals, with... (More)

Nanometer-sized particles of W are of interest in semiconductor device research, where such particles may store electrons inside heteroepitaxially defined structures. In this paper, we present results concerning W particles produced by thermal decomposition of tungsten hexacarbonyl. By the described method, it was possible to produce size-selected, single-crystalline W particles in the size range between 15 and 60 nm. The sintering behavior of the particles was studied between ambient temperatures and 1900 °C. The particle morphology and structure were examined with high-resolution transmission electron microscopy and electron diffraction techniques. Particles sintered at the highest temperatures typically were single crystals, with well-developed facets. Some problems concerning a yield reducing charging mechanism are discussed.

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publication status
published
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in
Journal of Materials Research
volume
15
issue
7
pages
6 pages
publisher
Materials Research Society
external identifiers
  • scopus:0034236078
ISSN
0884-2914
DOI
10.1557/JMR.2000.0224
language
English
LU publication?
yes
id
2486f4ed-6459-4f1e-b27b-6318e1fb6787
date added to LUP
2019-05-08 16:19:15
date last changed
2020-12-08 03:55:42
@article{2486f4ed-6459-4f1e-b27b-6318e1fb6787,
  abstract     = {<p>Nanometer-sized particles of W are of interest in semiconductor device research, where such particles may store electrons inside heteroepitaxially defined structures. In this paper, we present results concerning W particles produced by thermal decomposition of tungsten hexacarbonyl. By the described method, it was possible to produce size-selected, single-crystalline W particles in the size range between 15 and 60 nm. The sintering behavior of the particles was studied between ambient temperatures and 1900 °C. The particle morphology and structure were examined with high-resolution transmission electron microscopy and electron diffraction techniques. Particles sintered at the highest temperatures typically were single crystals, with well-developed facets. Some problems concerning a yield reducing charging mechanism are discussed.</p>},
  author       = {Magnusson, Martin H. and Deppert, Knut and Malm, Jan Olle},
  issn         = {0884-2914},
  language     = {eng},
  number       = {7},
  pages        = {1564--1569},
  publisher    = {Materials Research Society},
  series       = {Journal of Materials Research},
  title        = {Single-crystalline tungsten nanoparticles produced by thermal decomposition of tungsten hexacarbonyl},
  url          = {http://dx.doi.org/10.1557/JMR.2000.0224},
  doi          = {10.1557/JMR.2000.0224},
  volume       = {15},
  year         = {2000},
}