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Miniaturized flowthrough microdispenser with piezoceramic tripod actuation

Bergkvist, Jonas LU ; Lilliehorn, T; Nilsson, Johan LU ; Johansson, S and Laurell, Thomas LU (2005) In Journal of Microelectromechanical Systems 14(1). p.134-140
Abstract
In this paper, the further development of a silicon flowthrough microdispenser is described. Previously reported designs of the dispenser used bimorph, and later multilayered, piezoelectric actuator elements for the generation of droplets. The introduction of a multilayered actuator significantly reduced the voltage amplitude needed to dispense droplets. Dispenser properties relevant for chemical analysis systems, e.g., reduced sample volume, internal surface area, and dispersion, were improved by miniaturization of the device. In this paper, a new actuator design, the tripod, is presented to enable further dispenser miniaturization and to facilitate device assembly. Tripod actuators were manufactured using a prototyping process, based on... (More)
In this paper, the further development of a silicon flowthrough microdispenser is described. Previously reported designs of the dispenser used bimorph, and later multilayered, piezoelectric actuator elements for the generation of droplets. The introduction of a multilayered actuator significantly reduced the voltage amplitude needed to dispense droplets. Dispenser properties relevant for chemical analysis systems, e.g., reduced sample volume, internal surface area, and dispersion, were improved by miniaturization of the device. In this paper, a new actuator design, the tripod, is presented to enable further dispenser miniaturization and to facilitate device assembly. Tripod actuators were manufactured using a prototyping process, based on micromilling, for multilayer piezoceramic components. A building technique for miniaturized electrical interconnects, based on microstructured flexible printed circuits, is also suggested in line with the prospect of future miniaturization. The microfluidic properties of the tripod- actuated dispenser were evaluated. Stable droplet generation in the frequency range from 0 to 3 kHz was demonstrated, providing a maximum dispensed flow rate of 7.8 muL/min. (Less)
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
lead zirconate, piezoactuator, miniaturization, dispenser, droplet, titanate (PZT)
in
Journal of Microelectromechanical Systems
volume
14
issue
1
pages
134 - 140
publisher
IEEE--Institute of Electrical and Electronics Engineers Inc.
external identifiers
  • wos:000226965200015
  • scopus:14044276907
ISSN
1057-7157
DOI
10.1109/JMEMS.2004.839000
language
English
LU publication?
yes
id
551301b6-b609-4c78-8d26-5b56b041bb3d (old id 254318)
date added to LUP
2007-08-17 14:49:32
date last changed
2017-01-01 07:25:57
@article{551301b6-b609-4c78-8d26-5b56b041bb3d,
  abstract     = {In this paper, the further development of a silicon flowthrough microdispenser is described. Previously reported designs of the dispenser used bimorph, and later multilayered, piezoelectric actuator elements for the generation of droplets. The introduction of a multilayered actuator significantly reduced the voltage amplitude needed to dispense droplets. Dispenser properties relevant for chemical analysis systems, e.g., reduced sample volume, internal surface area, and dispersion, were improved by miniaturization of the device. In this paper, a new actuator design, the tripod, is presented to enable further dispenser miniaturization and to facilitate device assembly. Tripod actuators were manufactured using a prototyping process, based on micromilling, for multilayer piezoceramic components. A building technique for miniaturized electrical interconnects, based on microstructured flexible printed circuits, is also suggested in line with the prospect of future miniaturization. The microfluidic properties of the tripod- actuated dispenser were evaluated. Stable droplet generation in the frequency range from 0 to 3 kHz was demonstrated, providing a maximum dispensed flow rate of 7.8 muL/min.},
  author       = {Bergkvist, Jonas and Lilliehorn, T and Nilsson, Johan and Johansson, S and Laurell, Thomas},
  issn         = {1057-7157},
  keyword      = {lead zirconate,piezoactuator,miniaturization,dispenser,droplet,titanate (PZT)},
  language     = {eng},
  number       = {1},
  pages        = {134--140},
  publisher    = {IEEE--Institute of Electrical and Electronics Engineers Inc.},
  series       = {Journal of Microelectromechanical Systems},
  title        = {Miniaturized flowthrough microdispenser with piezoceramic tripod actuation},
  url          = {http://dx.doi.org/10.1109/JMEMS.2004.839000},
  volume       = {14},
  year         = {2005},
}