Digital in-line holography on amplitude and phase objects prepared with electron beam lithography.
(2012) In Journal of Microscopy 247(2). p.196-201- Abstract
- We report on the fabrication and characterization of amplitude and phase samples consisting of well defined Au or Al features formed on ultrathin silicon nitride membranes. The samples were manufactured using electron beam lithography, metallization and a lift-off technique, which allow precise lateral control and thickness of the metal features. The fabricated specimens were evaluated by conventional microscopy, atomic force microscopy and with the digital in-line holography set-up at the Lund Laser Centre. The latter uses high-order harmonic generation as a light source, and is capable of recovering both the shape and phase shifting properties of the samples. We report on the details of the sample production and on the imaging tests with... (More)
- We report on the fabrication and characterization of amplitude and phase samples consisting of well defined Au or Al features formed on ultrathin silicon nitride membranes. The samples were manufactured using electron beam lithography, metallization and a lift-off technique, which allow precise lateral control and thickness of the metal features. The fabricated specimens were evaluated by conventional microscopy, atomic force microscopy and with the digital in-line holography set-up at the Lund Laser Centre. The latter uses high-order harmonic generation as a light source, and is capable of recovering both the shape and phase shifting properties of the samples. We report on the details of the sample production and on the imaging tests with the holography set-up. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/2859772
- author
- organization
- publishing date
- 2012
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Journal of Microscopy
- volume
- 247
- issue
- 2
- pages
- 196 - 201
- publisher
- John Wiley & Sons Inc.
- external identifiers
-
- wos:000306311800007
- pmid:22670851
- scopus:84863860077
- pmid:22670851
- ISSN
- 0022-2720
- DOI
- 10.1111/j.1365-2818.2012.03632.x
- language
- English
- LU publication?
- yes
- additional info
- The information about affiliations in this record was updated in December 2015. The record was previously connected to the following departments: Max-laboratory (011012005), Solid State Physics (011013006), Synchrotron Radiation Research (011013009), Atomic physics (011013005), Physics, Faculty of Technology (011013200)
- id
- c5a3bf17-db4c-4d66-af55-8da58fcbfe01 (old id 2859772)
- date added to LUP
- 2016-04-01 14:27:04
- date last changed
- 2023-09-03 14:39:16
@article{c5a3bf17-db4c-4d66-af55-8da58fcbfe01, abstract = {{We report on the fabrication and characterization of amplitude and phase samples consisting of well defined Au or Al features formed on ultrathin silicon nitride membranes. The samples were manufactured using electron beam lithography, metallization and a lift-off technique, which allow precise lateral control and thickness of the metal features. The fabricated specimens were evaluated by conventional microscopy, atomic force microscopy and with the digital in-line holography set-up at the Lund Laser Centre. The latter uses high-order harmonic generation as a light source, and is capable of recovering both the shape and phase shifting properties of the samples. We report on the details of the sample production and on the imaging tests with the holography set-up.}}, author = {{Schwenke, Jörg and Lorek, Eleonora and Rakowski, Rafal and He, Xinkui and Kvennefors, Anders and Mikkelsen, Anders and Rudawski, Piotr and Heyl, Christoph and Maximov, Ivan and Pettersson, Sven-Göran and Persson, Anders and L'Huillier, Anne}}, issn = {{0022-2720}}, language = {{eng}}, number = {{2}}, pages = {{196--201}}, publisher = {{John Wiley & Sons Inc.}}, series = {{Journal of Microscopy}}, title = {{Digital in-line holography on amplitude and phase objects prepared with electron beam lithography.}}, url = {{http://dx.doi.org/10.1111/j.1365-2818.2012.03632.x}}, doi = {{10.1111/j.1365-2818.2012.03632.x}}, volume = {{247}}, year = {{2012}}, }