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Digital in-line holography on amplitude and phase objects prepared with electron beam lithography.

Schwenke, Jörg LU ; Lorek, Eleonora LU ; Rakowski, Rafal LU ; He, Xinkui LU ; Kvennefors, Anders LU ; Mikkelsen, Anders LU ; Rudawski, Piotr LU ; Heyl, Christoph LU ; Maximov, Ivan LU and Pettersson, Sven-Göran LU , et al. (2012) In Journal of Microscopy 247(2). p.196-201
Abstract
We report on the fabrication and characterization of amplitude and phase samples consisting of well defined Au or Al features formed on ultrathin silicon nitride membranes. The samples were manufactured using electron beam lithography, metallization and a lift-off technique, which allow precise lateral control and thickness of the metal features. The fabricated specimens were evaluated by conventional microscopy, atomic force microscopy and with the digital in-line holography set-up at the Lund Laser Centre. The latter uses high-order harmonic generation as a light source, and is capable of recovering both the shape and phase shifting properties of the samples. We report on the details of the sample production and on the imaging tests with... (More)
We report on the fabrication and characterization of amplitude and phase samples consisting of well defined Au or Al features formed on ultrathin silicon nitride membranes. The samples were manufactured using electron beam lithography, metallization and a lift-off technique, which allow precise lateral control and thickness of the metal features. The fabricated specimens were evaluated by conventional microscopy, atomic force microscopy and with the digital in-line holography set-up at the Lund Laser Centre. The latter uses high-order harmonic generation as a light source, and is capable of recovering both the shape and phase shifting properties of the samples. We report on the details of the sample production and on the imaging tests with the holography set-up. (Less)
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publishing date
type
Contribution to journal
publication status
published
subject
in
Journal of Microscopy
volume
247
issue
2
pages
196 - 201
publisher
Wiley-Blackwell
external identifiers
  • wos:000306311800007
  • pmid:22670851
  • scopus:84863860077
ISSN
0022-2720
DOI
10.1111/j.1365-2818.2012.03632.x
language
English
LU publication?
yes
id
c5a3bf17-db4c-4d66-af55-8da58fcbfe01 (old id 2859772)
date added to LUP
2012-08-06 12:12:36
date last changed
2017-01-01 06:15:05
@article{c5a3bf17-db4c-4d66-af55-8da58fcbfe01,
  abstract     = {We report on the fabrication and characterization of amplitude and phase samples consisting of well defined Au or Al features formed on ultrathin silicon nitride membranes. The samples were manufactured using electron beam lithography, metallization and a lift-off technique, which allow precise lateral control and thickness of the metal features. The fabricated specimens were evaluated by conventional microscopy, atomic force microscopy and with the digital in-line holography set-up at the Lund Laser Centre. The latter uses high-order harmonic generation as a light source, and is capable of recovering both the shape and phase shifting properties of the samples. We report on the details of the sample production and on the imaging tests with the holography set-up.},
  author       = {Schwenke, Jörg and Lorek, Eleonora and Rakowski, Rafal and He, Xinkui and Kvennefors, Anders and Mikkelsen, Anders and Rudawski, Piotr and Heyl, Christoph and Maximov, Ivan and Pettersson, Sven-Göran and Persson, Anders and L'Huillier, Anne},
  issn         = {0022-2720},
  language     = {eng},
  number       = {2},
  pages        = {196--201},
  publisher    = {Wiley-Blackwell},
  series       = {Journal of Microscopy},
  title        = {Digital in-line holography on amplitude and phase objects prepared with electron beam lithography.},
  url          = {http://dx.doi.org/10.1111/j.1365-2818.2012.03632.x},
  volume       = {247},
  year         = {2012},
}