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Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect

Whitlow, Harry J LU ; Ng, May Ling LU ; Auzelyte, Vaida LU ; Maximov, Ivan LU ; Montelius, Lars LU ; van Kan, JA; Bettiol, AA and Watt, F (2004) In Nanotechnology 15(1). p.223-226
Abstract
Metal electrode structures for biosensors with a high spatial density and similar to85 nm gaps have been produced using focused megaelectronvolt (MeV) proton beam writing of poly-(methyl methacrylate) positive resist combined with metal lift-off. The minimal proximity exposure and straight proton trajectories in (similar to100 nm) resist layers for focused MeV proton beam writing are strongly indicative that ultimate electrode gap widths approaching a few nanometres are achievable.
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Nanotechnology
volume
15
issue
1
pages
223 - 226
publisher
IOP Publishing
external identifiers
  • wos:000188463600041
  • scopus:0742301759
ISSN
0957-4484
DOI
10.1088/0957-4484/15/1/040
language
Romanian
LU publication?
yes
id
a8c53c92-76a9-4a75-ae9f-b4b3948622ff (old id 288968)
date added to LUP
2007-11-05 13:57:37
date last changed
2017-08-06 03:44:26
@article{a8c53c92-76a9-4a75-ae9f-b4b3948622ff,
  abstract     = {Metal electrode structures for biosensors with a high spatial density and similar to85 nm gaps have been produced using focused megaelectronvolt (MeV) proton beam writing of poly-(methyl methacrylate) positive resist combined with metal lift-off. The minimal proximity exposure and straight proton trajectories in (similar to100 nm) resist layers for focused MeV proton beam writing are strongly indicative that ultimate electrode gap widths approaching a few nanometres are achievable.},
  author       = {Whitlow, Harry J and Ng, May Ling and Auzelyte, Vaida and Maximov, Ivan and Montelius, Lars and van Kan, JA and Bettiol, AA and Watt, F},
  issn         = {0957-4484},
  language     = {rum},
  number       = {1},
  pages        = {223--226},
  publisher    = {IOP Publishing},
  series       = {Nanotechnology},
  title        = {Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect},
  url          = {http://dx.doi.org/10.1088/0957-4484/15/1/040},
  volume       = {15},
  year         = {2004},
}