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Fabrication and mechanical characterization of ultrashort nanocantilevers

Ghatnekar-Nilsson, Sara LU ; Sarwe, Eva-Lena LU and Montelius, Lars LU (2003) In Applied Physics Letters 83(5). p.990-992
Abstract
Three aspects on nanocantilevers are presented in this letter. First, we present the fabrication process of 2 mum long freestanding chromium cantilevers with width 150 nm, and thickness 50 nm. Second, a measurement scheme using an atomic force microscope operating in contact mode was employed to study the mechanical properties along the length of the cantilevers. Third, we have investigated extremely large deflections on these nanoscale cantilevers demonstrating their high ductility. The spring constants calculated from the experimental data are smaller than expected from classical mechanics calculations, but show good agreement with previously reported calculations for largely deflected beams. (C) 2003 American Institute of Physics.
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Applied Physics Letters
volume
83
issue
5
pages
990 - 992
publisher
American Institute of Physics
external identifiers
  • wos:000184474000060
  • scopus:0041876448
ISSN
0003-6951
DOI
10.1063/1.1592303
language
English
LU publication?
yes
id
0a885db7-a9a1-4c87-b387-3c1dd5b21082 (old id 305124)
date added to LUP
2007-09-19 12:27:37
date last changed
2018-10-03 10:36:36
@article{0a885db7-a9a1-4c87-b387-3c1dd5b21082,
  abstract     = {Three aspects on nanocantilevers are presented in this letter. First, we present the fabrication process of 2 mum long freestanding chromium cantilevers with width 150 nm, and thickness 50 nm. Second, a measurement scheme using an atomic force microscope operating in contact mode was employed to study the mechanical properties along the length of the cantilevers. Third, we have investigated extremely large deflections on these nanoscale cantilevers demonstrating their high ductility. The spring constants calculated from the experimental data are smaller than expected from classical mechanics calculations, but show good agreement with previously reported calculations for largely deflected beams. (C) 2003 American Institute of Physics.},
  author       = {Ghatnekar-Nilsson, Sara and Sarwe, Eva-Lena and Montelius, Lars},
  issn         = {0003-6951},
  language     = {eng},
  number       = {5},
  pages        = {990--992},
  publisher    = {American Institute of Physics},
  series       = {Applied Physics Letters},
  title        = {Fabrication and mechanical characterization of ultrashort nanocantilevers},
  url          = {http://dx.doi.org/10.1063/1.1592303},
  volume       = {83},
  year         = {2003},
}