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Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect

Graczyk, Mariusz LU ; Balaz, Martina LU ; Linke, Heiner LU and Maximov, Ivan LU (2012) In Microelectronic Engineering 97. p.173-176
Abstract
The spatial control of molecular motor function, using nanostructured surfaces, is of great interest for the development of commercial devices for diagnostics and high-throughput drug screening with molecular motors as targets. In the present study we have fabricated 100-300 nm wide nanochannels, completely subsurfaced on fused silica chips, with the aim to interface them with a microfluidic system. Such a system will allow for changes in the chemical environment surrounding molecular motors, with minimal influence on their directional motion. This will be achieved by changing the chemical environment in a perpendicular direction to the motor motion and allowing the chemical substances to diffuse in and out of the nanochannels via a small... (More)
The spatial control of molecular motor function, using nanostructured surfaces, is of great interest for the development of commercial devices for diagnostics and high-throughput drug screening with molecular motors as targets. In the present study we have fabricated 100-300 nm wide nanochannels, completely subsurfaced on fused silica chips, with the aim to interface them with a microfluidic system. Such a system will allow for changes in the chemical environment surrounding molecular motors, with minimal influence on their directional motion. This will be achieved by changing the chemical environment in a perpendicular direction to the motor motion and allowing the chemical substances to diffuse in and out of the nanochannels via a small slit (5-10 nm) on the top of the nanochannels. To create this slit, and to control its width, we here demonstrate the use of a self-closing effect based on the volume increase (2.27 times) during oxidation of silicon. The details of the fabrication steps (EBL, RIE and oxidation) are discussed. (C) 2012 Elsevier B.V. All rights reserved. (Less)
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Nanochannels, Electron beam lithography, Oxidation, Fused silica
in
Microelectronic Engineering
volume
97
pages
173 - 176
publisher
Elsevier
external identifiers
  • wos:000309316300042
  • scopus:84865476572
ISSN
1873-5568
DOI
10.1016/j.mee.2012.01.010
language
English
LU publication?
yes
id
28d5c611-8d92-44fd-99f5-020cba796d2c (old id 3188051)
date added to LUP
2012-12-06 11:09:26
date last changed
2017-01-01 03:47:57
@article{28d5c611-8d92-44fd-99f5-020cba796d2c,
  abstract     = {The spatial control of molecular motor function, using nanostructured surfaces, is of great interest for the development of commercial devices for diagnostics and high-throughput drug screening with molecular motors as targets. In the present study we have fabricated 100-300 nm wide nanochannels, completely subsurfaced on fused silica chips, with the aim to interface them with a microfluidic system. Such a system will allow for changes in the chemical environment surrounding molecular motors, with minimal influence on their directional motion. This will be achieved by changing the chemical environment in a perpendicular direction to the motor motion and allowing the chemical substances to diffuse in and out of the nanochannels via a small slit (5-10 nm) on the top of the nanochannels. To create this slit, and to control its width, we here demonstrate the use of a self-closing effect based on the volume increase (2.27 times) during oxidation of silicon. The details of the fabrication steps (EBL, RIE and oxidation) are discussed. (C) 2012 Elsevier B.V. All rights reserved.},
  author       = {Graczyk, Mariusz and Balaz, Martina and Linke, Heiner and Maximov, Ivan},
  issn         = {1873-5568},
  keyword      = {Nanochannels,Electron beam lithography,Oxidation,Fused silica},
  language     = {eng},
  pages        = {173--176},
  publisher    = {Elsevier},
  series       = {Microelectronic Engineering},
  title        = {Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect},
  url          = {http://dx.doi.org/10.1016/j.mee.2012.01.010},
  volume       = {97},
  year         = {2012},
}