Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect
Graczyk, Mariusz LU ; Balaz, Martina LU ; Linke, Heiner LU
and Maximov, Ivan
LU
(2012)
In Microelectronic Engineering
97.
p.173-176
- Abstract
- The spatial control of molecular motor function, using nanostructured surfaces, is of great interest for the development of commercial devices for diagnostics and high-throughput drug screening with molecular motors as targets. In the present study we have fabricated 100-300 nm wide nanochannels, completely subsurfaced on fused silica chips, with the aim to interface them with a microfluidic system. Such a system will allow for changes in the chemical environment surrounding molecular motors, with minimal influence on their directional motion. This will be achieved by changing the chemical environment in a perpendicular direction to the motor motion and allowing the chemical substances to diffuse in and out of the nanochannels via a small... (More)
- The spatial control of molecular motor function, using nanostructured surfaces, is of great interest for the development of commercial devices for diagnostics and high-throughput drug screening with molecular motors as targets. In the present study we have fabricated 100-300 nm wide nanochannels, completely subsurfaced on fused silica chips, with the aim to interface them with a microfluidic system. Such a system will allow for changes in the chemical environment surrounding molecular motors, with minimal influence on their directional motion. This will be achieved by changing the chemical environment in a perpendicular direction to the motor motion and allowing the chemical substances to diffuse in and out of the nanochannels via a small slit (5-10 nm) on the top of the nanochannels. To create this slit, and to control its width, we here demonstrate the use of a self-closing effect based on the volume increase (2.27 times) during oxidation of silicon. The details of the fabrication steps (EBL, RIE and oxidation) are discussed. (C) 2012 Elsevier B.V. All rights reserved. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3188051
- author
- Graczyk, Mariusz
LU
; Balaz, Martina
LU
; Linke, Heiner
LU
and Maximov, Ivan
LU
- organization
- publishing date
- 2012
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- Nanochannels, Electron beam lithography, Oxidation, Fused silica
- in
- Microelectronic Engineering
- volume
- 97
- pages
- 173 - 176
- publisher
- Elsevier
- external identifiers
-
- wos:000309316300042
- scopus:84865476572
- ISSN
- 1873-5568
- DOI
- 10.1016/j.mee.2012.01.010
- language
- English
- LU publication?
- yes
- id
- 28d5c611-8d92-44fd-99f5-020cba796d2c (old id 3188051)
- date added to LUP
- 2016-04-01 10:40:18
- date last changed
- 2023-08-31 08:23:07
@article{28d5c611-8d92-44fd-99f5-020cba796d2c,
abstract = {{The spatial control of molecular motor function, using nanostructured surfaces, is of great interest for the development of commercial devices for diagnostics and high-throughput drug screening with molecular motors as targets. In the present study we have fabricated 100-300 nm wide nanochannels, completely subsurfaced on fused silica chips, with the aim to interface them with a microfluidic system. Such a system will allow for changes in the chemical environment surrounding molecular motors, with minimal influence on their directional motion. This will be achieved by changing the chemical environment in a perpendicular direction to the motor motion and allowing the chemical substances to diffuse in and out of the nanochannels via a small slit (5-10 nm) on the top of the nanochannels. To create this slit, and to control its width, we here demonstrate the use of a self-closing effect based on the volume increase (2.27 times) during oxidation of silicon. The details of the fabrication steps (EBL, RIE and oxidation) are discussed. (C) 2012 Elsevier B.V. All rights reserved.}},
author = {{Graczyk, Mariusz and Balaz, Martina and Linke, Heiner and Maximov, Ivan}},
issn = {{1873-5568}},
keywords = {{Nanochannels; Electron beam lithography; Oxidation; Fused silica}},
language = {{eng}},
pages = {{173--176}},
publisher = {{Elsevier}},
series = {{Microelectronic Engineering}},
title = {{Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect}},
url = {{http://dx.doi.org/10.1016/j.mee.2012.01.010}},
doi = {{10.1016/j.mee.2012.01.010}},
volume = {{97}},
year = {{2012}},
}