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2015
Mark III-V nanowires for logics and beyond
Wernersson, Lars-Erik ^LU (2015) In Microelectronic Engineering 147. p.344-348
- Contribution to journal › Article
Mark Transfer of vertical nanowire arrays on polycaprolactone substrates for biological applications
von Ahnen, Inga ; Piret, Gaelle ^LU and Prinz, Christelle ^LU (2015) In Microelectronic Engineering 135. p.52-56
- Contribution to journal › Article
2012
Mark Fabrication of high aspect ratio SU-8 micropillar arrays
Amato, Letizia ; Keller, Stephan S. ; Heiskanen, Arto ^LU ; Dimaki, Maria ; Emnéus, Jenny ^LU ; Boisen, Anja and Tenje, Maria ^LU (2012) In Microelectronic Engineering 98(Special issue MNE 2011 - Part II). p.483-487
- Contribution to journal › Article
Mark Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect
Graczyk, Mariusz ^LU ; Balaz, Martina ^LU ; Linke, Heiner ^LU and Maximov, Ivan ^LU (2012) In Microelectronic Engineering 97. p.173-176
- Contribution to journal › Article
2011
Mark Temperature and annealing effects on InAs nanowire MOSFETs
Johansson, Sofia ^LU ; Gorji, Sepideh ^LU ; Borg, Mattias ^LU ; Lind, Erik ^LU and Wernersson, Lars-Erik ^LU (2011) 17th International Conference on Insultating Films on Semiconductors 88(7). p.1105-1108
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Development of nanoporous gold electrodes for electrochemical applications
Quan, Xueling ; Fischer, Lee M. ; Boisen, Anja and Tenje, Maria ^LU (2011) In Microelectronic Engineering 88(8). p.2379-2382
- Contribution to journal › Article
Mark Fabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate
Meng, Fantao ; Luo, Gang ^LU ; Maximov, Ivan ^LU ; Montelius, Lars ^LU ; Chu, Jinkui and Xu, Hongqi ^LU (2011) In Microelectronic Engineering 88(10). p.3108-3112
- Contribution to journal › Article
Mark Temperature and frequency characterization of InAs nanowire and HfO2 interface using capacitance-voltage method
Astromskas, Gvidas ^LU ; Storm, Kristian ^LU ; Caroff, Philippe ^LU ; Borgström, Magnus ^LU ; Lind, Erik ^LU and Wernersson, Lars-Erik ^LU (2011) EMRS 2010 Spring Meeting on Post-Si-CMOS Electronic Devices - The Role of Ge and III-V Materials 88(4). p.444-447
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
2009
Mark Deposition of HfO2 on InAs by atomic-layer deposition
Wheeler, D. ; Wernersson, Lars-Erik ^LU ; Fröberg, Linus ^LU ; Thelander, Claes ^LU ; Mikkelsen, Anders ^LU ; Weststrate, K. -J. ; Sonnet, A. ; Vogel, E. M. and Seabaugh, A. (2009) 16th Biennial Conference on Insulating Films on Semiconductors 86(7-9). p.1561-1563
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Negative UV–NIL (NUV–NIL) – A mix-and-match NIL and UV strategy for realisation of nano- and micrometre structures
Skjolding, Lars Henrik ^LU ; Turon Teixidor, Genis ^LU ; Emnéus, Jenny ^LU and Montelius, Lars ^LU (2009) 34th International Conference on Micro- and Nano-Engineering 86(4-6). p.654-656
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding

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