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Nanopatterned rGO/ZnO:Al seed layer for vertical growth of single ZnO nanorods

Chalangar, Ebrahim ; Mustafa, Elfatih ; Nur, Omer ; Willander, Magnus and Pettersson, Håkan LU (2023) In Nanotechnology 34(25).
Abstract

In this work, we demonstrate a novel low-cost template-assisted route to synthesize vertical ZnO nanorod arrays on Si (100). The nanorods were grown on a patterned double seed layer comprised of reduced graphene oxide (rGO) and Al-doped ZnO nanoparticles. The seed layer was fabricated by spray-coating the substrate with graphene and then dip-coating it into a Al-doped ZnO sol-gel solution. The growth template was fabricated from a double-layer resist, spin-coated on top of the rGO/ZnO:Al seed layer, and patterned by colloidal lithography. The results show a successful chemical bath deposition of vertically aligned ZnO nanorods with controllable diameter and density in the nanoholes in the patterned resist mask. Our novel method can... (More)

In this work, we demonstrate a novel low-cost template-assisted route to synthesize vertical ZnO nanorod arrays on Si (100). The nanorods were grown on a patterned double seed layer comprised of reduced graphene oxide (rGO) and Al-doped ZnO nanoparticles. The seed layer was fabricated by spray-coating the substrate with graphene and then dip-coating it into a Al-doped ZnO sol-gel solution. The growth template was fabricated from a double-layer resist, spin-coated on top of the rGO/ZnO:Al seed layer, and patterned by colloidal lithography. The results show a successful chemical bath deposition of vertically aligned ZnO nanorods with controllable diameter and density in the nanoholes in the patterned resist mask. Our novel method can presumably be used to fabricate electronic devices on virtually any smooth substrate with a thermal budget of 1 min at 300 °C with the seed layer acting as a conductive strain-relieving back contact. The top contact can simply be made by depositing a suitable transparent conductive oxide or metal, depending on the specific application.

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author
; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
colloidal lithography, nanofabrication, nanorod arrays, reduced graphene oxide, sol-gel, vertical growth, zinc oxide
in
Nanotechnology
volume
34
issue
25
article number
255301
publisher
IOP Publishing
external identifiers
  • pmid:36947870
  • scopus:85152244759
ISSN
0957-4484
DOI
10.1088/1361-6528/acc662
language
English
LU publication?
yes
id
52deb2a2-3541-41c0-bf11-2c0cc0a7822d
date added to LUP
2023-06-20 13:34:12
date last changed
2024-04-19 22:59:46
@article{52deb2a2-3541-41c0-bf11-2c0cc0a7822d,
  abstract     = {{<p>In this work, we demonstrate a novel low-cost template-assisted route to synthesize vertical ZnO nanorod arrays on Si (100). The nanorods were grown on a patterned double seed layer comprised of reduced graphene oxide (rGO) and Al-doped ZnO nanoparticles. The seed layer was fabricated by spray-coating the substrate with graphene and then dip-coating it into a Al-doped ZnO sol-gel solution. The growth template was fabricated from a double-layer resist, spin-coated on top of the rGO/ZnO:Al seed layer, and patterned by colloidal lithography. The results show a successful chemical bath deposition of vertically aligned ZnO nanorods with controllable diameter and density in the nanoholes in the patterned resist mask. Our novel method can presumably be used to fabricate electronic devices on virtually any smooth substrate with a thermal budget of 1 min at 300 °C with the seed layer acting as a conductive strain-relieving back contact. The top contact can simply be made by depositing a suitable transparent conductive oxide or metal, depending on the specific application.</p>}},
  author       = {{Chalangar, Ebrahim and Mustafa, Elfatih and Nur, Omer and Willander, Magnus and Pettersson, Håkan}},
  issn         = {{0957-4484}},
  keywords     = {{colloidal lithography; nanofabrication; nanorod arrays; reduced graphene oxide; sol-gel; vertical growth; zinc oxide}},
  language     = {{eng}},
  number       = {{25}},
  publisher    = {{IOP Publishing}},
  series       = {{Nanotechnology}},
  title        = {{Nanopatterned rGO/ZnO:Al seed layer for vertical growth of single ZnO nanorods}},
  url          = {{http://dx.doi.org/10.1088/1361-6528/acc662}},
  doi          = {{10.1088/1361-6528/acc662}},
  volume       = {{34}},
  year         = {{2023}},
}