Electron-beam mixing of W1 - xSix Si multilayers
(1995) In Vacuum 46(8-10). p.1063-1064- Abstract
- The high energy electron beam was used for the local amorphisation of metallic multilayer. The observed effect is proposed for the application in nanometer-scale technology.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/5868c9fc-79e1-4b2d-9912-b2f986ad1025
- author
- Vavra, I ; Wallenberg, LR LU and Kudryashov, VA
- organization
- publishing date
- 1995-08-01
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Vacuum
- volume
- 46
- issue
- 8-10
- pages
- 2 pages
- publisher
- Elsevier
- external identifiers
-
- scopus:0029358019
- ISSN
- 0042-207X
- DOI
- 10.1016/0042-207X(95)00107-7
- language
- English
- LU publication?
- yes
- id
- 5868c9fc-79e1-4b2d-9912-b2f986ad1025
- date added to LUP
- 2023-10-31 15:43:57
- date last changed
- 2023-11-07 11:54:55
@article{5868c9fc-79e1-4b2d-9912-b2f986ad1025,
abstract = {{The high energy electron beam was used for the local amorphisation of metallic multilayer. The observed effect is proposed for the application in nanometer-scale technology.}},
author = {{Vavra, I and Wallenberg, LR and Kudryashov, VA}},
issn = {{0042-207X}},
language = {{eng}},
month = {{08}},
number = {{8-10}},
pages = {{1063--1064}},
publisher = {{Elsevier}},
series = {{Vacuum}},
title = {{Electron-beam mixing of W1 - xSix Si multilayers}},
url = {{http://dx.doi.org/10.1016/0042-207X(95)00107-7}},
doi = {{10.1016/0042-207X(95)00107-7}},
volume = {{46}},
year = {{1995}},
}