A method for selective etching of nanostructures
Khan, Md Sabbir Ahmed ; Sundqvist, Jonas LU and Suyatin, Dmitry LU
(2019)
US 2019 / 0080918 A1
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/5d134b2e-f41d-4485-9804-e72d87765453
- inventor
- Khan, Md Sabbir Ahmed
; Sundqvist, Jonas
LU
and Suyatin, Dmitry
LU
- organization
- publishing date
- 2019-03-14
- type
- Patent
- publication status
- published
- subject
- publisher
- Google Patents
- patent number
- US 2019 / 0080918 A1
- language
- English
- LU publication?
- yes
- additional info
- US Patent App. 16/084,992
- id
- 5d134b2e-f41d-4485-9804-e72d87765453
- date added to LUP
- 2019-05-15 13:51:27
- date last changed
- 2019-06-02 02:17:03
@misc{5d134b2e-f41d-4485-9804-e72d87765453,
author = {{Khan, Md Sabbir Ahmed and Sundqvist, Jonas and Suyatin, Dmitry}},
language = {{eng}},
month = {{03}},
note = {{Patent, Patent Number: US 2019 / 0080918 A1}},
publisher = {{Google Patents}},
title = {{A method for selective etching of nanostructures}},
url = {{https://lup.lub.lu.se/search/files/65311771/US20190080918A1.pdf}},
year = {{2019}},
}