Jonas Sundqvist (Former)

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2019
Mark A method for selective etching of nanostructures
Khan, Md Sabbir Ahmed ; Sundqvist, Jonas ^LU and Suyatin, Dmitry ^LU (2019) US 2019 / 0080918 A1
- Patent › Patent
2018
Mark High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching
Khan, Sabbir Ahmed ; Suyatin, Dmitry ^LU ; Sundqvist, Jonas ^LU ; Graczyk, Mariusz ^LU ; Junige, Marcel ; Kauppinen, Christoffer ; Kvennefors, Anders ^LU ; Huffman, Maria ^LU and Maximov, Ivan ^LU (2018) In ACS Applied Nano Materials p.2476-2482
- Contribution to journal › Article
2017
Mark Atomic layer etching of gallium nitride (0001)
Kauppinen, Christoffer ; Khan, Sabbir Ahmed ; Sundqvist, Jonas ^LU ; Suyatin, Dmitry B. ^LU ; Suihkonen, Sami ; Kauppinen, Esko I. and Sopanen, Markku (2017) In Journal of Vacuum Science and Technology A 35(6).
- Contribution to journal › Article
Mark Review Article : Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"
Ahvenniemi, Esko ; Akbashev, Andrew R. ; Ali, Saima ; Bechelany, Mikhael ; Berdova, Maria ; Boyadjiev, Stefan ; Cameron, David C. ; Chen, Rong ; Chubarov, Mikhail and Cremers, Veronique , et al. (2017) In Journal of Vacuum Science and Technology A 35(1).
- Contribution to journal › Article
2015
Mark Low temperature deposition of silicon nitride using Si3Cl8
Riedel, Stefan ; Sundqvist, Jonas ^LU and Gumprecht, Thomas (2015) In Thin Solid Films 577. p.114-118
- Contribution to journal › Article