Advanced

Sulfur passivation for ohmic contact formation to InAs nanowires

Suyatin, Dmitry LU ; Thelander, Claes LU ; Björk, M. T.; Maximov, Ivan LU and Samuelson, Lars LU (2007) In Nanotechnology 18(10).
Abstract
We have studied the formation of ohmic contacts to InAs nanowires by chemical etching and passivation of the contact areas in an ammonium polysulfide, (NH4)(2)S-x, water solution. The nanowires were exposed to different dilution levels of the (NH4)(2)Sx solution before contact metal evaporation. A process based on a highly diluted ( NH4)S-2(x) solution was found to be self-terminating, with minimal etching of the InAs. The stability of the contacts was investigated with electrical measurements as a function of storage time in vacuum and air.
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Nanotechnology
volume
18
issue
10
publisher
IOP Publishing
external identifiers
  • wos:000245230100011
  • scopus:33947530366
ISSN
0957-4484
DOI
10.1088/0957-4484/18/10/105307
language
English
LU publication?
yes
id
491b04c1-9618-4fe9-8ab3-454587c9bdc9 (old id 669307)
date added to LUP
2007-12-18 15:18:32
date last changed
2017-10-01 03:47:51
@article{491b04c1-9618-4fe9-8ab3-454587c9bdc9,
  abstract     = {We have studied the formation of ohmic contacts to InAs nanowires by chemical etching and passivation of the contact areas in an ammonium polysulfide, (NH4)(2)S-x, water solution. The nanowires were exposed to different dilution levels of the (NH4)(2)Sx solution before contact metal evaporation. A process based on a highly diluted ( NH4)S-2(x) solution was found to be self-terminating, with minimal etching of the InAs. The stability of the contacts was investigated with electrical measurements as a function of storage time in vacuum and air.},
  articleno    = {105307},
  author       = {Suyatin, Dmitry and Thelander, Claes and Björk, M. T. and Maximov, Ivan and Samuelson, Lars},
  issn         = {0957-4484},
  language     = {eng},
  number       = {10},
  publisher    = {IOP Publishing},
  series       = {Nanotechnology},
  title        = {Sulfur passivation for ohmic contact formation to InAs nanowires},
  url          = {http://dx.doi.org/10.1088/0957-4484/18/10/105307},
  volume       = {18},
  year         = {2007},
}