Nanoimprint in PDMS on glass with two-level hybrid stamp
Carlberg, Patrick LU ; Montelius, Lars LU and Tegenfeldt, Jonas LU
(2008)
In Microelectronic Engineering
85(1).
p.210-213
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/988397
- author
- Carlberg, Patrick
LU
; Montelius, Lars
LU
and Tegenfeldt, Jonas
LU
- organization
- publishing date
- 2008
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Microelectronic Engineering
- volume
- 85
- issue
- 1
- pages
- 210 - 213
- publisher
- Elsevier
- external identifiers
-
- wos:000253030100036
- scopus:36148952879
- ISSN
- 1873-5568
- DOI
- 10.1016/j.mee.2007.05.010
- language
- English
- LU publication?
- yes
- id
- 6a9ff803-ce7f-46ea-b906-8508c8bc9a5c (old id 988397)
- date added to LUP
- 2016-04-04 13:28:00
- date last changed
- 2025-10-14 10:34:58
@article{6a9ff803-ce7f-46ea-b906-8508c8bc9a5c,
author = {{Carlberg, Patrick and Montelius, Lars and Tegenfeldt, Jonas}},
issn = {{1873-5568}},
language = {{eng}},
number = {{1}},
pages = {{210--213}},
publisher = {{Elsevier}},
series = {{Microelectronic Engineering}},
title = {{Nanoimprint in PDMS on glass with two-level hybrid stamp}},
url = {{http://dx.doi.org/10.1016/j.mee.2007.05.010}},
doi = {{10.1016/j.mee.2007.05.010}},
volume = {{85}},
year = {{2008}},
}