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Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist

Forsén, E; Nilsson, S G; Carlberg, Patrick LU ; Abadal, G; Pérez-Murano, F; Esteve, J; Montserrat, J; Figueras, E; Campabadal, F and Verd, J, et al. (2004) Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004) In Nanotechnol 15, S628-S633 (2004)
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Nanotechnol 15, S628-S633 (2004)
conference name
Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)
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English
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af86d2f5-1761-432f-893d-58a4f5356797 (old id 962336)
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2008-01-28 17:11:06
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2016-04-16 10:51:16
@inproceedings{af86d2f5-1761-432f-893d-58a4f5356797,
  author       = {Forsén, E and Nilsson, S G and Carlberg, Patrick and Abadal, G and Pérez-Murano, F and Esteve, J and Montserrat, J and Figueras, E and Campabadal, F and Verd, J and Montelius, Lars and Barniol, N and Boisen, A},
  booktitle    = {Nanotechnol 15, S628-S633 (2004)},
  language     = {eng},
  title        = {Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist},
  year         = {2004},
}