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- 2004
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Mark
Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist
(
- Contribution to journal › Article
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Mark
Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist
2004) Nanoscale Dev and System Integr Conf, Miami, Fl, USA (2004)(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding