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Nanoimprint in PDMS on glass with two-level hybrid stamp

Carlberg, Patrick LU ; Montelius, Lars LU and Tegenfeldt, Jonas LU (2008) In Microelectronic Engineering 85(1). p.210-213
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Microelectronic Engineering
volume
85
issue
1
pages
210 - 213
publisher
Elsevier
external identifiers
  • wos:000253030100036
  • scopus:36148952879
ISSN
1873-5568
DOI
10.1016/j.mee.2007.05.010
language
English
LU publication?
yes
id
6a9ff803-ce7f-46ea-b906-8508c8bc9a5c (old id 988397)
date added to LUP
2008-01-29 11:50:10
date last changed
2017-01-01 08:12:03
@article{6a9ff803-ce7f-46ea-b906-8508c8bc9a5c,
  author       = {Carlberg, Patrick and Montelius, Lars and Tegenfeldt, Jonas},
  issn         = {1873-5568},
  language     = {eng},
  number       = {1},
  pages        = {210--213},
  publisher    = {Elsevier},
  series       = {Microelectronic Engineering},
  title        = {Nanoimprint in PDMS on glass with two-level hybrid stamp},
  url          = {http://dx.doi.org/10.1016/j.mee.2007.05.010},
  volume       = {85},
  year         = {2008},
}