Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays
(2010) In Chinese Physics Letters 27(2).- Abstract
- Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The "pull-in" effect in dc driving and the "hard spring effect" in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high.. factor. The mass-spring lump model combined with Green's function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for... (More)
- Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The "pull-in" effect in dc driving and the "hard spring effect" in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high.. factor. The mass-spring lump model combined with Green's function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for guiding the geometrical design of cantilever-based sensors. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/1571102
- author
- Guan, Zhi-Qiang ; Luo, Gang LU ; Montelius, Lars LU and Xu, Hongxing LU
- organization
- publishing date
- 2010
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Chinese Physics Letters
- volume
- 27
- issue
- 2
- article number
- 028503
- publisher
- IOP Publishing
- external identifiers
-
- wos:000274360800086
- scopus:77049119940
- ISSN
- 1741-3540
- DOI
- 10.1088/0256-307X/27/2/028503
- language
- English
- LU publication?
- yes
- id
- a86b5e14-ff83-4ee3-b13a-554c7c8d098d (old id 1571102)
- date added to LUP
- 2016-04-01 10:24:53
- date last changed
- 2023-08-31 02:06:54
@article{a86b5e14-ff83-4ee3-b13a-554c7c8d098d,
abstract = {{Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The "pull-in" effect in dc driving and the "hard spring effect" in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high.. factor. The mass-spring lump model combined with Green's function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for guiding the geometrical design of cantilever-based sensors.}},
author = {{Guan, Zhi-Qiang and Luo, Gang and Montelius, Lars and Xu, Hongxing}},
issn = {{1741-3540}},
language = {{eng}},
number = {{2}},
publisher = {{IOP Publishing}},
series = {{Chinese Physics Letters}},
title = {{Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays}},
url = {{http://dx.doi.org/10.1088/0256-307X/27/2/028503}},
doi = {{10.1088/0256-307X/27/2/028503}},
volume = {{27}},
year = {{2010}},
}