Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N
(2016) 6th International Conference Nanomaterials: Applications and Properties, NAP 2016- Abstract
Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 1017 ions/cm2 and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/af67dab9-aa2b-4de5-9220-6b47bfc2bd05
- author
- Shypylenko, A. ; Pshyk, A. V. ; Medjanik, K. LU ; Peplinska, B. ; Oyoshid, K. ; Jurga, S. and Coya, E.
- organization
- publishing date
- 2016-11-28
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- keywords
- CAVD, coatings, hardness, ion implantation, NEXAFS, TiSiN, young modulus
- host publication
- Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016
- article number
- 7757251
- publisher
- IEEE - Institute of Electrical and Electronics Engineers Inc.
- conference name
- 6th International Conference Nanomaterials: Applications and Properties, NAP 2016
- conference location
- Lviv, Ukraine
- conference dates
- 2016-09-14 - 2016-09-19
- external identifiers
-
- scopus:85007044588
- ISBN
- 9781509025138
- DOI
- 10.1109/NAP.2016.7757251
- language
- English
- LU publication?
- yes
- id
- af67dab9-aa2b-4de5-9220-6b47bfc2bd05
- date added to LUP
- 2017-01-23 12:37:14
- date last changed
- 2022-07-06 15:22:49
@inproceedings{af67dab9-aa2b-4de5-9220-6b47bfc2bd05, abstract = {{<p>Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 10<sup>17</sup> ions/cm<sup>2</sup> and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.</p>}}, author = {{Shypylenko, A. and Pshyk, A. V. and Medjanik, K. and Peplinska, B. and Oyoshid, K. and Jurga, S. and Coya, E.}}, booktitle = {{Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016}}, isbn = {{9781509025138}}, keywords = {{CAVD; coatings; hardness; ion implantation; NEXAFS; TiSiN; young modulus}}, language = {{eng}}, month = {{11}}, publisher = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}}, title = {{Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N}}, url = {{http://dx.doi.org/10.1109/NAP.2016.7757251}}, doi = {{10.1109/NAP.2016.7757251}}, year = {{2016}}, }