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Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N

Shypylenko, A.; Pshyk, A. V.; Medjanik, K. LU ; Peplinska, B.; Oyoshid, K.; Jurga, S. and Coya, E. (2016) 6th International Conference Nanomaterials: Applications and Properties, NAP 2016 In Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016
Abstract

Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 1017 ions/cm2 and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.

Please use this url to cite or link to this publication:
author
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
keywords
CAVD, coatings, hardness, ion implantation, NEXAFS, TiSiN, young modulus
in
Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016
publisher
Institute of Electrical and Electronics Engineers Inc.
conference name
6th International Conference Nanomaterials: Applications and Properties, NAP 2016
external identifiers
  • scopus:85007044588
ISBN
9781509025138
DOI
10.1109/NAP.2016.7757251
language
English
LU publication?
yes
id
af67dab9-aa2b-4de5-9220-6b47bfc2bd05
date added to LUP
2017-01-23 12:37:14
date last changed
2017-05-05 14:10:32
@inproceedings{af67dab9-aa2b-4de5-9220-6b47bfc2bd05,
  abstract     = {<p>Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 10<sup>17</sup> ions/cm<sup>2</sup> and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.</p>},
  author       = {Shypylenko, A. and Pshyk, A. V. and Medjanik, K. and Peplinska, B. and Oyoshid, K. and Jurga, S. and Coya, E.},
  booktitle    = {Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016},
  isbn         = {9781509025138},
  keyword      = {CAVD,coatings,hardness,ion implantation,NEXAFS,TiSiN,young modulus},
  language     = {eng},
  month        = {11},
  publisher    = {Institute of Electrical and Electronics Engineers Inc.},
  title        = {Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N},
  url          = {http://dx.doi.org/10.1109/NAP.2016.7757251},
  year         = {2016},
}