Interferometric characterization of rotation stages for X-ray nanotomography
(2017) In Review of Scientific Instruments 88(5).- Abstract
The field of three-dimensional multi-modal X-ray nanoimaging relies not only on high-brilliance X-rays but also on high-precision mechanics and position metrology. Currently available state-of-the-art linear and rotary drives can provide 3D position accuracy within tens to hundreds of nm, which is often insufficient for high resolution imaging with nanofocused X-ray beams. Motion errors are especially troublesome in the case of rotation drives and their correction is more complicated and relies on the metrology grade reference objects. Here we present a method which allows the characterisation and correction of the radial and angular errors of the rotary drives without the need for a highly accurate metrology object. The method is based... (More)
The field of three-dimensional multi-modal X-ray nanoimaging relies not only on high-brilliance X-rays but also on high-precision mechanics and position metrology. Currently available state-of-the-art linear and rotary drives can provide 3D position accuracy within tens to hundreds of nm, which is often insufficient for high resolution imaging with nanofocused X-ray beams. Motion errors are especially troublesome in the case of rotation drives and their correction is more complicated and relies on the metrology grade reference objects. Here we present a method which allows the characterisation and correction of the radial and angular errors of the rotary drives without the need for a highly accurate metrology object. The method is based on multi-probe error separation using fiber-laser interferometry and uses a standard cylindrical sample holder as a reference. The obtained runout and shape measurements are then used to perform the position corrections using additional drives. We demonstrate the results of the characterization for a piezo-driven small rotation stage. The error separation allowed us to measure the axis runout to be approximately ±1.25 μm, and with active runout compensation this could be reduced down to ±42 nm.
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- author
- Stankevic, Tomas LU ; Engblom, Christer ; Langlois, Florent ; Alves, Filipe ; Lestrade, Alain ; Jobert, Nicolas ; Cauchon, Gilles ; Vogt, Ulrich and Kubsky, Stefan
- organization
- publishing date
- 2017-05-01
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Review of Scientific Instruments
- volume
- 88
- issue
- 5
- article number
- 053703
- publisher
- American Institute of Physics (AIP)
- external identifiers
-
- scopus:85019598560
- pmid:28571450
- wos:000402801900036
- ISSN
- 0034-6748
- DOI
- 10.1063/1.4983405
- language
- English
- LU publication?
- yes
- id
- ce36641b-b9f4-4966-84db-32bd8fd9d0ec
- date added to LUP
- 2017-06-13 15:50:43
- date last changed
- 2024-10-14 07:51:44
@article{ce36641b-b9f4-4966-84db-32bd8fd9d0ec,
abstract = {{<p>The field of three-dimensional multi-modal X-ray nanoimaging relies not only on high-brilliance X-rays but also on high-precision mechanics and position metrology. Currently available state-of-the-art linear and rotary drives can provide 3D position accuracy within tens to hundreds of nm, which is often insufficient for high resolution imaging with nanofocused X-ray beams. Motion errors are especially troublesome in the case of rotation drives and their correction is more complicated and relies on the metrology grade reference objects. Here we present a method which allows the characterisation and correction of the radial and angular errors of the rotary drives without the need for a highly accurate metrology object. The method is based on multi-probe error separation using fiber-laser interferometry and uses a standard cylindrical sample holder as a reference. The obtained runout and shape measurements are then used to perform the position corrections using additional drives. We demonstrate the results of the characterization for a piezo-driven small rotation stage. The error separation allowed us to measure the axis runout to be approximately ±1.25 μm, and with active runout compensation this could be reduced down to ±42 nm.</p>}},
author = {{Stankevic, Tomas and Engblom, Christer and Langlois, Florent and Alves, Filipe and Lestrade, Alain and Jobert, Nicolas and Cauchon, Gilles and Vogt, Ulrich and Kubsky, Stefan}},
issn = {{0034-6748}},
language = {{eng}},
month = {{05}},
number = {{5}},
publisher = {{American Institute of Physics (AIP)}},
series = {{Review of Scientific Instruments}},
title = {{Interferometric characterization of rotation stages for X-ray nanotomography}},
url = {{http://dx.doi.org/10.1063/1.4983405}},
doi = {{10.1063/1.4983405}},
volume = {{88}},
year = {{2017}},
}