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Interferometric characterization of rotation stages for X-ray nanotomography

Stankevic, Tomas LU ; Engblom, Christer; Langlois, Florent; Alves, Filipe; Lestrade, Alain; Jobert, Nicolas; Cauchon, Gilles; Vogt, Ulrich and Kubsky, Stefan (2017) In Review of Scientific Instruments 88(5).
Abstract

The field of three-dimensional multi-modal X-ray nanoimaging relies not only on high-brilliance X-rays but also on high-precision mechanics and position metrology. Currently available state-of-the-art linear and rotary drives can provide 3D position accuracy within tens to hundreds of nm, which is often insufficient for high resolution imaging with nanofocused X-ray beams. Motion errors are especially troublesome in the case of rotation drives and their correction is more complicated and relies on the metrology grade reference objects. Here we present a method which allows the characterisation and correction of the radial and angular errors of the rotary drives without the need for a highly accurate metrology object. The method is based... (More)

The field of three-dimensional multi-modal X-ray nanoimaging relies not only on high-brilliance X-rays but also on high-precision mechanics and position metrology. Currently available state-of-the-art linear and rotary drives can provide 3D position accuracy within tens to hundreds of nm, which is often insufficient for high resolution imaging with nanofocused X-ray beams. Motion errors are especially troublesome in the case of rotation drives and their correction is more complicated and relies on the metrology grade reference objects. Here we present a method which allows the characterisation and correction of the radial and angular errors of the rotary drives without the need for a highly accurate metrology object. The method is based on multi-probe error separation using fiber-laser interferometry and uses a standard cylindrical sample holder as a reference. The obtained runout and shape measurements are then used to perform the position corrections using additional drives. We demonstrate the results of the characterization for a piezo-driven small rotation stage. The error separation allowed us to measure the axis runout to be approximately ±1.25 μm, and with active runout compensation this could be reduced down to ±42 nm.

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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Review of Scientific Instruments
volume
88
issue
5
publisher
American Institute of Physics
external identifiers
  • scopus:85019598560
  • wos:000402801900036
ISSN
0034-6748
DOI
10.1063/1.4983405
language
English
LU publication?
yes
id
ce36641b-b9f4-4966-84db-32bd8fd9d0ec
date added to LUP
2017-06-13 15:50:43
date last changed
2017-09-18 11:40:42
@article{ce36641b-b9f4-4966-84db-32bd8fd9d0ec,
  abstract     = {<p>The field of three-dimensional multi-modal X-ray nanoimaging relies not only on high-brilliance X-rays but also on high-precision mechanics and position metrology. Currently available state-of-the-art linear and rotary drives can provide 3D position accuracy within tens to hundreds of nm, which is often insufficient for high resolution imaging with nanofocused X-ray beams. Motion errors are especially troublesome in the case of rotation drives and their correction is more complicated and relies on the metrology grade reference objects. Here we present a method which allows the characterisation and correction of the radial and angular errors of the rotary drives without the need for a highly accurate metrology object. The method is based on multi-probe error separation using fiber-laser interferometry and uses a standard cylindrical sample holder as a reference. The obtained runout and shape measurements are then used to perform the position corrections using additional drives. We demonstrate the results of the characterization for a piezo-driven small rotation stage. The error separation allowed us to measure the axis runout to be approximately ±1.25 μm, and with active runout compensation this could be reduced down to ±42 nm.</p>},
  articleno    = {053703},
  author       = {Stankevic, Tomas and Engblom, Christer and Langlois, Florent and Alves, Filipe and Lestrade, Alain and Jobert, Nicolas and Cauchon, Gilles and Vogt, Ulrich and Kubsky, Stefan},
  issn         = {0034-6748},
  language     = {eng},
  month        = {05},
  number       = {5},
  publisher    = {American Institute of Physics},
  series       = {Review of Scientific Instruments},
  title        = {Interferometric characterization of rotation stages for X-ray nanotomography},
  url          = {http://dx.doi.org/10.1063/1.4983405},
  volume       = {88},
  year         = {2017},
}