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A compact CMOS MEMS microphone with 66dB SNR

Citakovic, Jelena ; Høvesten, Per F. ; Rocca, Gino ; van Halteren, Aart ; Rombach, Pirmin ; Stenberg, Lars J. ; Andreani, Pietro LU and Bruun, Erik (2009) IEEE International Solid-State Circuits Conference (ISSCC), 2009 52. p.350-351
Abstract
A microphone system, comprising two differentially-operated MEMS microphones and a CMOS differential amplifier mounted on a common die substrate, has a very small volume of 2.6x3.2x0.865mm3, showing a record-high SNR of 66dB over the 20Hz-20kHz audio band. The system sensitivity is -33.5dB (Vrms/Pa), PSRR is above 55dB, and THD is below 1% for sound pressure levels below 112dB. The current consumption is 120μA from a 1.8V power supply.
Please use this url to cite or link to this publication:
author
; ; ; ; ; ; and
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
keywords
integrated, microphone, CMOS, MEMS
host publication
[Host publication title missing]
volume
52
pages
2 pages
conference name
IEEE International Solid-State Circuits Conference (ISSCC), 2009
conference location
San Francisco, United States
conference dates
2009-02-08 - 2009-02-12
external identifiers
  • scopus:70349279078
ISSN
0193-6530
DOI
10.1109/ISSCC.2009.4977452
language
English
LU publication?
yes
id
daeaf06d-5b47-48d1-967f-cf7d087f5e29 (old id 1300085)
date added to LUP
2016-04-04 09:19:53
date last changed
2022-04-08 02:32:00
@inproceedings{daeaf06d-5b47-48d1-967f-cf7d087f5e29,
  abstract     = {{A microphone system, comprising two differentially-operated MEMS microphones and a CMOS differential amplifier mounted on a common die substrate, has a very small volume of 2.6x3.2x0.865mm3, showing a record-high SNR of 66dB over the 20Hz-20kHz audio band. The system sensitivity is -33.5dB (Vrms/Pa), PSRR is above 55dB, and THD is below 1% for sound pressure levels below 112dB. The current consumption is 120μA from a 1.8V power supply.}},
  author       = {{Citakovic, Jelena and Høvesten, Per F. and Rocca, Gino and van Halteren, Aart and Rombach, Pirmin and Stenberg, Lars J. and Andreani, Pietro and Bruun, Erik}},
  booktitle    = {{[Host publication title missing]}},
  issn         = {{0193-6530}},
  keywords     = {{integrated; microphone; CMOS; MEMS}},
  language     = {{eng}},
  pages        = {{350--351}},
  title        = {{A compact CMOS MEMS microphone with 66dB SNR}},
  url          = {{http://dx.doi.org/10.1109/ISSCC.2009.4977452}},
  doi          = {{10.1109/ISSCC.2009.4977452}},
  volume       = {{52}},
  year         = {{2009}},
}