Template-assisted vapour–liquid–solid growth of InP nanowires on (001) InP and Si substrates
(2020) In Nanoscale 12(2). p.888-894- Abstract
- We report on the synthesis of vertical InP nanowire arrays on (001) InP and Si substrates using template-assisted vapour–liquid–solid growth. A thick silicon oxide layer was first deposited on the substrates. The samples were then patterned by electron beam lithography and deep dry etching through the oxide layer down to the substrate surface. Gold seed particles were subsequently deposited in the holes of the pattern by the use of pulse electrodeposition. The subsequent growth of nanowires by the vapour–liquid–solid method was guided towards the [001] direction by the patterned oxide template, and displayed a high growth yield with respect to the array of holes in the template. In order to confirm the versatility and robustness of the... (More)
- We report on the synthesis of vertical InP nanowire arrays on (001) InP and Si substrates using template-assisted vapour–liquid–solid growth. A thick silicon oxide layer was first deposited on the substrates. The samples were then patterned by electron beam lithography and deep dry etching through the oxide layer down to the substrate surface. Gold seed particles were subsequently deposited in the holes of the pattern by the use of pulse electrodeposition. The subsequent growth of nanowires by the vapour–liquid–solid method was guided towards the [001] direction by the patterned oxide template, and displayed a high growth yield with respect to the array of holes in the template. In order to confirm the versatility and robustness of the process, we have also demonstrated guided growth of InP nanowire p–n junctions and InP/InAs/InP nanowire heterostructures on (001) InP substrates. Our results show a promising route to monolithically integrate III–V nanowire heterostructure devices with commercially viable (001) silicon platforms. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/df286a83-052e-4313-b544-a04b13db87a6
- author
- Jafari Jam, Reza LU ; Persson, Axel LU ; Barrigon, Enrique LU ; Heurlin, Magnus LU ; Geijselaers, Irene LU ; Gomez, Victor LU ; Hultin, Olof LU ; Samuelson, Lars LU ; Borgström, Magnus LU and Pettersson, Håkan LU
- organization
- publishing date
- 2020-01-14
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Nanoscale
- volume
- 12
- issue
- 2
- pages
- 7 pages
- publisher
- Royal Society of Chemistry
- external identifiers
-
- scopus:85077403365
- pmid:31833520
- ISSN
- 2040-3372
- DOI
- 10.1039/c9nr08025b
- project
- Integration of III-V nanowires with (001) substrates
- language
- English
- LU publication?
- yes
- id
- df286a83-052e-4313-b544-a04b13db87a6
- date added to LUP
- 2019-12-13 18:30:18
- date last changed
- 2023-11-19 20:09:34
@article{df286a83-052e-4313-b544-a04b13db87a6, abstract = {{We report on the synthesis of vertical InP nanowire arrays on (001) InP and Si substrates using template-assisted vapour–liquid–solid growth. A thick silicon oxide layer was first deposited on the substrates. The samples were then patterned by electron beam lithography and deep dry etching through the oxide layer down to the substrate surface. Gold seed particles were subsequently deposited in the holes of the pattern by the use of pulse electrodeposition. The subsequent growth of nanowires by the vapour–liquid–solid method was guided towards the [001] direction by the patterned oxide template, and displayed a high growth yield with respect to the array of holes in the template. In order to confirm the versatility and robustness of the process, we have also demonstrated guided growth of InP nanowire p–n junctions and InP/InAs/InP nanowire heterostructures on (001) InP substrates. Our results show a promising route to monolithically integrate III–V nanowire heterostructure devices with commercially viable (001) silicon platforms.}}, author = {{Jafari Jam, Reza and Persson, Axel and Barrigon, Enrique and Heurlin, Magnus and Geijselaers, Irene and Gomez, Victor and Hultin, Olof and Samuelson, Lars and Borgström, Magnus and Pettersson, Håkan}}, issn = {{2040-3372}}, language = {{eng}}, month = {{01}}, number = {{2}}, pages = {{888--894}}, publisher = {{Royal Society of Chemistry}}, series = {{Nanoscale}}, title = {{Template-assisted vapour–liquid–solid growth of InP nanowires on (001) InP and Si substrates}}, url = {{http://dx.doi.org/10.1039/c9nr08025b}}, doi = {{10.1039/c9nr08025b}}, volume = {{12}}, year = {{2020}}, }