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Template-assisted vapour–liquid–solid growth of InP nanowires on (001) InP and Si substrates

Jafari Jam, Reza LU ; Persson, Axel LU orcid ; Barrigon, Enrique LU ; Heurlin, Magnus LU ; Geijselaers, Irene LU ; Gomez, Victor LU orcid ; Hultin, Olof LU ; Samuelson, Lars LU ; Borgström, Magnus LU and Pettersson, Håkan LU (2020) In Nanoscale 12(2). p.888-894
Abstract
We report on the synthesis of vertical InP nanowire arrays on (001) InP and Si substrates using template-assisted vapour–liquid–solid growth. A thick silicon oxide layer was first deposited on the substrates. The samples were then patterned by electron beam lithography and deep dry etching through the oxide layer down to the substrate surface. Gold seed particles were subsequently deposited in the holes of the pattern by the use of pulse electrodeposition. The subsequent growth of nanowires by the vapour–liquid–solid method was guided towards the [001] direction by the patterned oxide template, and displayed a high growth yield with respect to the array of holes in the template. In order to confirm the versatility and robustness of the... (More)
We report on the synthesis of vertical InP nanowire arrays on (001) InP and Si substrates using template-assisted vapour–liquid–solid growth. A thick silicon oxide layer was first deposited on the substrates. The samples were then patterned by electron beam lithography and deep dry etching through the oxide layer down to the substrate surface. Gold seed particles were subsequently deposited in the holes of the pattern by the use of pulse electrodeposition. The subsequent growth of nanowires by the vapour–liquid–solid method was guided towards the [001] direction by the patterned oxide template, and displayed a high growth yield with respect to the array of holes in the template. In order to confirm the versatility and robustness of the process, we have also demonstrated guided growth of InP nanowire p–n junctions and InP/InAs/InP nanowire heterostructures on (001) InP substrates. Our results show a promising route to monolithically integrate III–V nanowire heterostructure devices with commercially viable (001) silicon platforms. (Less)
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author
; ; ; ; ; ; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Nanoscale
volume
12
issue
2
pages
7 pages
publisher
Royal Society of Chemistry
external identifiers
  • scopus:85077403365
  • pmid:31833520
ISSN
2040-3372
DOI
10.1039/c9nr08025b
project
Integration of III-V nanowires with (001) substrates
language
English
LU publication?
yes
id
df286a83-052e-4313-b544-a04b13db87a6
date added to LUP
2019-12-13 18:30:18
date last changed
2023-11-19 20:09:34
@article{df286a83-052e-4313-b544-a04b13db87a6,
  abstract     = {{We report on the synthesis of vertical InP nanowire arrays on (001) InP and Si substrates using template-assisted vapour–liquid–solid growth. A thick silicon oxide layer was first deposited on the substrates. The samples were then patterned by electron beam lithography and deep dry etching through the oxide layer down to the substrate surface. Gold seed particles were subsequently deposited in the holes of the pattern by the use of pulse electrodeposition. The subsequent growth of nanowires by the vapour–liquid–solid method was guided towards the [001] direction by the patterned oxide template, and displayed a high growth yield with respect to the array of holes in the template. In order to confirm the versatility and robustness of the process, we have also demonstrated guided growth of InP nanowire p–n junctions and InP/InAs/InP nanowire heterostructures on (001) InP substrates. Our results show a promising route to monolithically integrate III–V nanowire heterostructure devices with commercially viable (001) silicon platforms.}},
  author       = {{Jafari Jam, Reza and Persson, Axel and Barrigon, Enrique and Heurlin, Magnus and Geijselaers, Irene and Gomez, Victor and Hultin, Olof and Samuelson, Lars and Borgström, Magnus and Pettersson, Håkan}},
  issn         = {{2040-3372}},
  language     = {{eng}},
  month        = {{01}},
  number       = {{2}},
  pages        = {{888--894}},
  publisher    = {{Royal Society of Chemistry}},
  series       = {{Nanoscale}},
  title        = {{Template-assisted vapour–liquid–solid growth of InP nanowires on (001) InP and Si substrates}},
  url          = {{http://dx.doi.org/10.1039/c9nr08025b}},
  doi          = {{10.1039/c9nr08025b}},
  volume       = {{12}},
  year         = {{2020}},
}