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Fabrication of 10 nm enclosed nanofluidic channels

Cao, Han ; Yu, Zhaoning ; Wang, Jian LU ; Tegenfeldt, Jonas O. LU orcid ; Austin, Robert H. ; Chen, Erli ; Wu, Wei and Chou, Stephen Y. (2002) In Applied Physics Letters 81(1). p.174-176
Abstract

We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas (100 mm wafers). The nanofluidic channels were further narrowed and sealed by techniques that are based on nonuniform deposition. The resulting sealed channels have a cross section as small as 10 nm by 50 nm, of great importance for confining biological molecules into ultrasmall spaces. These techniques can be valuable fabrication tools for Nanoelectromechanical Systems and Micro/Nano Total Analysis Systems.

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author
; ; ; ; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
in
Applied Physics Letters
volume
81
issue
1
pages
3 pages
publisher
American Institute of Physics (AIP)
external identifiers
  • scopus:79958221815
ISSN
0003-6951
DOI
10.1063/1.1489102
language
English
LU publication?
yes
id
e173bc6d-0b19-49fd-8bac-3499684d7b03
date added to LUP
2018-10-20 10:40:51
date last changed
2021-06-30 01:53:17
@article{e173bc6d-0b19-49fd-8bac-3499684d7b03,
  abstract     = {<p>We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas (100 mm wafers). The nanofluidic channels were further narrowed and sealed by techniques that are based on nonuniform deposition. The resulting sealed channels have a cross section as small as 10 nm by 50 nm, of great importance for confining biological molecules into ultrasmall spaces. These techniques can be valuable fabrication tools for Nanoelectromechanical Systems and Micro/Nano Total Analysis Systems.</p>},
  author       = {Cao, Han and Yu, Zhaoning and Wang, Jian and Tegenfeldt, Jonas O. and Austin, Robert H. and Chen, Erli and Wu, Wei and Chou, Stephen Y.},
  issn         = {0003-6951},
  language     = {eng},
  month        = {07},
  number       = {1},
  pages        = {174--176},
  publisher    = {American Institute of Physics (AIP)},
  series       = {Applied Physics Letters},
  title        = {Fabrication of 10 nm enclosed nanofluidic channels},
  url          = {http://dx.doi.org/10.1063/1.1489102},
  doi          = {10.1063/1.1489102},
  volume       = {81},
  year         = {2002},
}