Quantitative laser diagnostics on trimethylindium pyrolysis and photolysis for functional nanoparticle growth
Samuelsson, Per LU ; Magnusson, Martin H. LU ; Deppert, Knut LU
; Aldén, Marcus
LU
and Li, Zhongshan
LU
(2022)
In Measurement Science and Technology
33(5).
- Abstract
We report on an optical investigation of the pyrolysis and photolysis of trimethylindium (TMIn) as a typical metalorganic precursor for functional nanowire growth, aiming at an in-depth understanding of the governing chemistry and optimization of aerosol-based (aerotaxy) and epitaxial growth processes. A flow reactor with special consideration given to optical access was built to provide the chemical environment for in situ optical measurements on the pyrolysis and photolysis of TMIn. By probing a resonant transition of the indium atom, high-resolution laser absorption and laser-induced fluorescence spectroscopy were applied to obtain the atomic indium concentration at different chosen conditions in a spatially and temporally resolved... (More)
We report on an optical investigation of the pyrolysis and photolysis of trimethylindium (TMIn) as a typical metalorganic precursor for functional nanowire growth, aiming at an in-depth understanding of the governing chemistry and optimization of aerosol-based (aerotaxy) and epitaxial growth processes. A flow reactor with special consideration given to optical access was built to provide the chemical environment for in situ optical measurements on the pyrolysis and photolysis of TMIn. By probing a resonant transition of the indium atom, high-resolution laser absorption and laser-induced fluorescence spectroscopy were applied to obtain the atomic indium concentration at different chosen conditions in a spatially and temporally resolved manner. The results indicate that quantitative measurements of indium atoms under growth conditions are feasible. A 213 nm pulsed laser was employed to induce photolytic dissociation of TMIn vapor under chosen conditions. The photolytic dissociation of TMIn vapor with an ultraviolet laser turns out to be a promising method in generating substantial chemical effects, indicated by the generation of visible clouds of indium particles, and high concentrations of indium atoms far beyond the pyrolytically generated amount.
(Less)
- author
- Samuelsson, Per
LU
; Magnusson, Martin H.
LU
; Deppert, Knut
LU
; Aldén, Marcus
LU
and Li, Zhongshan
LU
- organization
- publishing date
- 2022-05
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- aerosols, indium, laser-induced fluorescence, metalorganic vapor phase epitaxy, photolysis, pyrolysis, trimethylindium
- in
- Measurement Science and Technology
- volume
- 33
- issue
- 5
- article number
- 055201
- publisher
- IOP Publishing
- external identifiers
-
- scopus:85125746604
- scopus:85125746604
- ISSN
- 0957-0233
- DOI
- 10.1088/1361-6501/ac51a4
- language
- English
- LU publication?
- yes
- id
- f57eb9c1-6b93-4152-b19a-dbfcc9bbe00d
- date added to LUP
- 2022-02-07 11:38:54
- date last changed
- 2023-11-21 02:53:28
@article{f57eb9c1-6b93-4152-b19a-dbfcc9bbe00d,
abstract = {{<p>We report on an optical investigation of the pyrolysis and photolysis of trimethylindium (TMIn) as a typical metalorganic precursor for functional nanowire growth, aiming at an in-depth understanding of the governing chemistry and optimization of aerosol-based (aerotaxy) and epitaxial growth processes. A flow reactor with special consideration given to optical access was built to provide the chemical environment for in situ optical measurements on the pyrolysis and photolysis of TMIn. By probing a resonant transition of the indium atom, high-resolution laser absorption and laser-induced fluorescence spectroscopy were applied to obtain the atomic indium concentration at different chosen conditions in a spatially and temporally resolved manner. The results indicate that quantitative measurements of indium atoms under growth conditions are feasible. A 213 nm pulsed laser was employed to induce photolytic dissociation of TMIn vapor under chosen conditions. The photolytic dissociation of TMIn vapor with an ultraviolet laser turns out to be a promising method in generating substantial chemical effects, indicated by the generation of visible clouds of indium particles, and high concentrations of indium atoms far beyond the pyrolytically generated amount.</p>}},
author = {{Samuelsson, Per and Magnusson, Martin H. and Deppert, Knut and Aldén, Marcus and Li, Zhongshan}},
issn = {{0957-0233}},
keywords = {{aerosols; indium; laser-induced fluorescence; metalorganic vapor phase epitaxy; photolysis; pyrolysis; trimethylindium}},
language = {{eng}},
number = {{5}},
publisher = {{IOP Publishing}},
series = {{Measurement Science and Technology}},
title = {{Quantitative laser diagnostics on trimethylindium pyrolysis and photolysis for functional nanoparticle growth}},
url = {{http://dx.doi.org/10.1088/1361-6501/ac51a4}},
doi = {{10.1088/1361-6501/ac51a4}},
volume = {{33}},
year = {{2022}},
}