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Electrical and Structural Properties of Si1−xGex Nanowires Prepared from a Single-Source Precursor

Behrle, Raphael ; Krause, Vanessa ; Seifner, Michael S. LU orcid ; Köstler, Benedikt ; Dick, Kimberly A. LU ; Wagner, Matthias ; Sistani, Masiar and Barth, Sven (2023) In Nanomaterials 13(4).
Abstract

Si1−xGex nanowires (NWs) were prepared by gold-supported chemical vapor deposition (CVD) using a single-source precursor with preformed Si–Ge bonds. Besides the tamed reactivity of the precursor, the approach reduces the process parameters associated with the control of decomposition characteristics and the dosing of individual precursors. The group IV alloy NWs are single crystalline with a constant diameter along their axis. During the wire growth by low pressure CVD, an Au-containing surface layer on the NWs forms by surface diffusion from the substrate, which can be removed by a combination of oxidation and etching. The electrical properties of the Si1−xGex/Au core-shell NWs are compared... (More)

Si1−xGex nanowires (NWs) were prepared by gold-supported chemical vapor deposition (CVD) using a single-source precursor with preformed Si–Ge bonds. Besides the tamed reactivity of the precursor, the approach reduces the process parameters associated with the control of decomposition characteristics and the dosing of individual precursors. The group IV alloy NWs are single crystalline with a constant diameter along their axis. During the wire growth by low pressure CVD, an Au-containing surface layer on the NWs forms by surface diffusion from the substrate, which can be removed by a combination of oxidation and etching. The electrical properties of the Si1−xGex/Au core-shell NWs are compared to the Si1−xGex NWs after Au removal. Core–shell NWs show signatures of metal-like behavior, while the purely semiconducting NWs reveal typical signatures of intrinsic Si1−xGex. The synthesized materials should be of high interest for applications in nano- and quantum-electronics.

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author
; ; ; ; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
alloy, CVD, field-effect transistors, germanium, nanowires, silicon
in
Nanomaterials
volume
13
issue
4
article number
627
publisher
MDPI AG
external identifiers
  • scopus:85149045690
  • pmid:36838995
ISSN
2079-4991
DOI
10.3390/nano13040627
language
English
LU publication?
yes
id
f7d770c7-8581-45ad-9e64-ed0a2369a437
date added to LUP
2023-03-20 14:17:53
date last changed
2024-06-28 01:58:34
@article{f7d770c7-8581-45ad-9e64-ed0a2369a437,
  abstract     = {{<p>Si<sub>1−x</sub>Ge<sub>x</sub> nanowires (NWs) were prepared by gold-supported chemical vapor deposition (CVD) using a single-source precursor with preformed Si–Ge bonds. Besides the tamed reactivity of the precursor, the approach reduces the process parameters associated with the control of decomposition characteristics and the dosing of individual precursors. The group IV alloy NWs are single crystalline with a constant diameter along their axis. During the wire growth by low pressure CVD, an Au-containing surface layer on the NWs forms by surface diffusion from the substrate, which can be removed by a combination of oxidation and etching. The electrical properties of the Si<sub>1−x</sub>Ge<sub>x</sub>/Au core-shell NWs are compared to the Si<sub>1−x</sub>Ge<sub>x</sub> NWs after Au removal. Core–shell NWs show signatures of metal-like behavior, while the purely semiconducting NWs reveal typical signatures of intrinsic Si<sub>1−x</sub>Ge<sub>x</sub>. The synthesized materials should be of high interest for applications in nano- and quantum-electronics.</p>}},
  author       = {{Behrle, Raphael and Krause, Vanessa and Seifner, Michael S. and Köstler, Benedikt and Dick, Kimberly A. and Wagner, Matthias and Sistani, Masiar and Barth, Sven}},
  issn         = {{2079-4991}},
  keywords     = {{alloy; CVD; field-effect transistors; germanium; nanowires; silicon}},
  language     = {{eng}},
  number       = {{4}},
  publisher    = {{MDPI AG}},
  series       = {{Nanomaterials}},
  title        = {{Electrical and Structural Properties of Si<sub>1−x</sub>Ge<sub>x</sub> Nanowires Prepared from a Single-Source Precursor}},
  url          = {{http://dx.doi.org/10.3390/nano13040627}},
  doi          = {{10.3390/nano13040627}},
  volume       = {{13}},
  year         = {{2023}},
}