Versatile vacuum chamber for in situ surface X-ray scattering studies
(2008) In Journal of Synchrotron Radiation 15(4). p.414-419- Abstract
A compact portable vacuum-compatible chamber designed for surface X-ray scattering measurements on beamline ID01 of the European Synchrotron Radiation Facility, Grenoble, is described. The chamber is versatile and can be used for in situ investigation of various systems, such as surfaces, nanostructures, thin films etc., using a variety of X-ray-based techniques such as reflectivity, grazing-incidence small-angle scattering and diffraction. It has been conceived for the study of morphology and structure of semiconductor surfaces during ion beam erosion, but it is also used for the study of surface oxidation or thin film growth under ultra-high-vacuum conditions. Coherent X-ray beam experiments are also possible. The chamber is described... (More)
A compact portable vacuum-compatible chamber designed for surface X-ray scattering measurements on beamline ID01 of the European Synchrotron Radiation Facility, Grenoble, is described. The chamber is versatile and can be used for in situ investigation of various systems, such as surfaces, nanostructures, thin films etc., using a variety of X-ray-based techniques such as reflectivity, grazing-incidence small-angle scattering and diffraction. It has been conceived for the study of morphology and structure of semiconductor surfaces during ion beam erosion, but it is also used for the study of surface oxidation or thin film growth under ultra-high-vacuum conditions. Coherent X-ray beam experiments are also possible. The chamber is described in detail, and examples of its use are given.
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- author
- Carbone, Dina LU ; Plantevin, Olivier ; Gago, Raul ; Mocuta, Cristian ; Bikondoa, Oier ; Alija, Alejandro ; Petit, Lucien ; Djazuli, Hamid and Metzger, Till Hartmut
- publishing date
- 2008
- type
- Contribution to journal
- publication status
- published
- keywords
- Grazing incidence, In situ X-ray scattering, Portable chamber, Surfaces
- in
- Journal of Synchrotron Radiation
- volume
- 15
- issue
- 4
- pages
- 6 pages
- publisher
- International Union of Crystallography
- external identifiers
-
- scopus:46149117321
- ISSN
- 0909-0495
- DOI
- 10.1107/S0909049508003944
- language
- English
- LU publication?
- no
- id
- fa18ac68-0f2c-4f2f-bbd4-c432ff9471b4
- date added to LUP
- 2021-12-15 11:56:13
- date last changed
- 2022-02-02 02:08:42
@article{fa18ac68-0f2c-4f2f-bbd4-c432ff9471b4,
abstract = {{<p>A compact portable vacuum-compatible chamber designed for surface X-ray scattering measurements on beamline ID01 of the European Synchrotron Radiation Facility, Grenoble, is described. The chamber is versatile and can be used for in situ investigation of various systems, such as surfaces, nanostructures, thin films etc., using a variety of X-ray-based techniques such as reflectivity, grazing-incidence small-angle scattering and diffraction. It has been conceived for the study of morphology and structure of semiconductor surfaces during ion beam erosion, but it is also used for the study of surface oxidation or thin film growth under ultra-high-vacuum conditions. Coherent X-ray beam experiments are also possible. The chamber is described in detail, and examples of its use are given.</p>}},
author = {{Carbone, Dina and Plantevin, Olivier and Gago, Raul and Mocuta, Cristian and Bikondoa, Oier and Alija, Alejandro and Petit, Lucien and Djazuli, Hamid and Metzger, Till Hartmut}},
issn = {{0909-0495}},
keywords = {{Grazing incidence; In situ X-ray scattering; Portable chamber; Surfaces}},
language = {{eng}},
number = {{4}},
pages = {{414--419}},
publisher = {{International Union of Crystallography}},
series = {{Journal of Synchrotron Radiation}},
title = {{Versatile vacuum chamber for in situ surface X-ray scattering studies}},
url = {{http://dx.doi.org/10.1107/S0909049508003944}},
doi = {{10.1107/S0909049508003944}},
volume = {{15}},
year = {{2008}},
}