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- 2006
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Mark
High resolution 100kV electron beam lithography in SU-8
(
- Contribution to journal › Article
- 2005
-
Mark
Nanochannels for DNA stretching fabricated on wafer scale by nanoimprint lithography with a stamp fabricated by 100 kV electron beam lithography in SU-8
2005) 31st Intl Conf Micro- and Nano-Engineering, 2005(
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
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Mark
Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography
(
- Contribution to journal › Article