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2009
Mark Fabrication of micro-mechanical sensors with the polymer SU-8
Keller, S. ; Tenje, Maria ^LU ; Noeth, N. ; Dohn, S. ; Blagoi, G. ; Haefliger, D. and Boisen, A. (2009) Eurosensors XXIII
- Contribution to conference › Paper, not in proceeding
2006
Mark Nano and micro-cantilever sensors – new materials and new read-out principles
Blagoi, G. ; Davies, Z. ; Dohn, S. ; Gammelgaard, L. ; Greve, A. ; Hales, J. ; Hansen, O. ; Haefliger, D. ; Jacobsen, M. H. and Johansson, A. , et al. (2006) 32nd International Conference on Micro and Nano Engineering (MNE 2006) p.5-6
- Contribution to conference › Paper, not in proceeding