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2025
Mark Surface effects in quasiatomic layer etching of silicon
Danielsson, Oscar ; Karimi, Amin ; Ilarionova, Yoana ; Garnæs, Jørgen ; Khan, Sabbir A. and Maximov, Ivan ^LU (2025) In Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 43(4).
- Contribution to journal › Article
2023
Mark Damage Analysis of Reactive Ion and Quasi-Atomic Layer Etched Silicon
Karimi, Amin ; Alabrash, Mohammad ; Lishan, David ; Jafari, Reza ; Aslan, Husnu ; Garnæs, Jørgen ; Uvarov, Andrei ; Ilarionova, Yoana ; Suyatin, Dmitry and Sundqvist, Jonas , et al. (2023) 23-rd International Conference on Atomic Layer Deposition
- Contribution to conference › Abstract

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