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- 2023
-
Mark
Damage Analysis of Reactive Ion and Quasi-Atomic Layer Etched Silicon
2023) 23-rd International Conference on Atomic Layer Deposition(
- Contribution to conference › Abstract
- 2019
-
Mark
A method for selective etching of nanostructures
2019) US 2019 / 0080918 A1(
- Patent › Patent
- 2018
-
Mark
High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching
(
- Contribution to journal › Article
- 2017
-
Mark
Atomic layer etching of gallium nitride (0001)
(
- Contribution to journal › Article
-
Mark
Review Article : Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"
(
- Contribution to journal › Article
- 2015
-
Mark
Low temperature deposition of silicon nitride using Si3Cl8
(
- Contribution to journal › Article