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- 2023
-
Mark
High Aspect Ratio Nanoscale Pores through BCP-Based Metal Oxide Masks and Advanced Dry Etching
Esmeraldo Paiva, Aislan ; Gerlt, Michael S LU
; Läubli, Nino F
; Prochukhan, Nadezda
; Baez Vasquez, Jhonattan Frank
; Kaminski Schierle, Gabriele S
and Morris, Michael A
(2023)
In ACS applied materials & interfaces
15(50).
p.57960-57969
- Contribution to journal › Article
- 2021
-
Mark
Reduced Etch Lag and High Aspect Ratios by Deep Reactive Ion Etching (DRIE)
Gerlt, Michael S LU
; Läubli, Nino F
; Manser, Michel
; Nelson, Bradley J
and Dual, Jürg
(2021)
In Micromachines
12(5).
- Contribution to journal › Article
-
Mark
Acoustically Excited Channel Walls for Microbiological Applications
Gerlt, Michael LU
; Läubli, Nino
; Ruppen, Peter
; Leuthner, Moritz
; Manser, Michel
; Wüthrich, Alexander
; Nelson, Bradley
; Panke, Sven
and Dual, Jürg
(2021)
25th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2021
In MicroTAS 2021 - 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences
p.65-66
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
-
Mark
Embedded Microbubbles for Acoustic Manipulation of Single Cells and Microfluidic Applications
Läubli, Nino F ; Gerlt, Michael S LU
; Wüthrich, Alexander
; Lewis, Renard T M
; Shamsudhin, Naveen
; Kutay, Ulrike
; Ahmed, Daniel
; Dual, Jürg
and Nelson, Bradley J
(2021)
In Analytical Chemistry
93(28).
p.9760-9770
- Contribution to journal › Article