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2002
Mark Nanoimprint in mr-L 6000.1 XP/PMMA resist system
Carlberg, Patrick ^LU ; Beck, Marc ^LU ; Graczyk, Mariusz ^LU ; Maximov, Ivan ^LU ; Sarwe, Eva-Lena ^LU ; Montelius, Lars ^LU ; Pfeiffer, K. ; Reuther, F. and Gruetzner, G. (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding
Mark Next generation nanotechnologies for sensor array fabrication
Montelius, Lars ^LU ; Beck, Marc ^LU ; Ling, T. ; Carlberg, Patrick ^LU ; Graczyk, Mariusz ^LU ; Maximov, Ivan ^LU and Sarwe, Eva-Lena ^LU (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding