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2017
Mark Si measurements : SiO_x on Si
Kalem, S. ; Tekin, S. B. ; Kaya, Z. E. ; Hannas, A. E. and Sundström, Villy ^LU (2017) 2017 Joint International EUROSOl Workshop and International Conference on Ultimate Integration on Silicon-ULIS, EUROSOI-ULIS 2017 p.235-238
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding