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- 2021
-
Mark
Fabrication of x-ray gratings for interferometric imaging by conformal seedless gold electroplating
Jefimovs, Konstantins ; Vila-Comamala, Joan ; Arboleda, Carolina ; Wang, Zhentian ; Romano, Lucia ; Shi, Zhitian ; Kagias, Matias LU
and Stampanoni, Marco
(2021)
In Micromachines
12(5).
- Contribution to journal › Article
- 2017
-
Mark
High aspect ratio silicon structures by displacement Talbot lithography and Bosch etching
Jefimovs, Konstantins ; Romano, Lucia ; Vila-Comamala, Joan ; Kagias, Matias LU
; Wang, Zhentian
; Wang, Li
; Dais, Christian
; Solak, Harun
and Stampanoni, Marco
(2017)
Advances in Patterning Materials and Processes XXXIV 2017
In Proceedings of SPIE - The International Society for Optical Engineering
10146.
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding