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- 2018
-
Mark
Approach to combine electron-beam lithography and two-photon polymerization for enhanced nano-channels in network-based biocomputation devices
Heldt, G. ; Meinecke, Ch ; Steenhusen, S. ; Korten, T. ; Groß, M. ; Domann, G. ; Lindberg, F. LU ; Reuter, D. ; Dietz, St and Linke, H. LU
, et al.
(2018)
34th European Mask and Lithography Conference, EMLC 2018
10775.
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding