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- 2017
-
Mark
Review Article : Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"
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- Contribution to journal › Article
- 2014
-
Mark
Dynamic parameter estimation of atomic layer deposition kinetics applied to in situ quartz crystal microbalance diagnostics
(
- Contribution to journal › Article
- 2013
-
Mark
A model-based methodology for the analysis and design of atomic layer deposition processes—Part III: Constrained multi-objective optimization
(
- Contribution to journal › Article
- 2012
-
Mark
A model-based methodology for the analysis and design of atomic layer deposition processes-Part I: Mechanistic modelling of continuous flow reactors
(
- Contribution to journal › Article