Electron Beam Lithography on Ultra-thin Silicon Nitride Membranes - Target Manufacturing for Digital Holography
(2010) In Lund Reports in Atomic Physics PHYM01 20101Atomic Physics
Please use this url to cite or link to this publication:
http://lup.lub.lu.se/student-papers/record/2260579
- author
- Lorek, Eleonora LU
- supervisor
- organization
- course
- PHYM01 20101
- year
- 2010
- type
- H2 - Master's Degree (Two Years)
- subject
- publication/series
- Lund Reports in Atomic Physics
- report number
- LRAP-416
- language
- English
- id
- 2260579
- date added to LUP
- 2012-01-28 22:36:05
- date last changed
- 2012-01-28 22:36:05
@misc{2260579, author = {{Lorek, Eleonora}}, language = {{eng}}, note = {{Student Paper}}, series = {{Lund Reports in Atomic Physics}}, title = {{Electron Beam Lithography on Ultra-thin Silicon Nitride Membranes - Target Manufacturing for Digital Holography}}, year = {{2010}}, }