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Electron Beam Lithography on Ultra-thin Silicon Nitride Membranes - Target Manufacturing for Digital Holography

Lorek, Eleonora LU (2010) In Lund Reports in Atomic Physics PHYM01 20101
Atomic Physics
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author
Lorek, Eleonora LU
supervisor
organization
course
PHYM01 20101
year
type
H2 - Master's Degree (Two Years)
subject
publication/series
Lund Reports in Atomic Physics
report number
LRAP-416
language
English
id
2260579
date added to LUP
2012-01-28 22:36:05
date last changed
2012-01-28 22:36:05
@misc{2260579,
  author       = {Lorek, Eleonora},
  language     = {eng},
  note         = {Student Paper},
  series       = {Lund Reports in Atomic Physics},
  title        = {Electron Beam Lithography on Ultra-thin Silicon Nitride Membranes - Target Manufacturing for Digital Holography},
  year         = {2010},
}