Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
(2004) In Microelectronic Engineering 73-74. p.837-842- Abstract
- Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/274500
- author
- Beck, Marc LU ; Persson, F ; Carlberg, Patrick LU ; Graczyk, Mariusz LU ; Maximov, Ivan LU ; Ling, TGI and Montelius, Lars LU
- organization
- publishing date
- 2004
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- transducer, nanoimprint lithography, sensor, redox cycling, interdigitated array electrode
- in
- Microelectronic Engineering
- volume
- 73-74
- pages
- 837 - 842
- publisher
- Elsevier
- external identifiers
-
- wos:000222145400149
- scopus:2542442954
- ISSN
- 1873-5568
- DOI
- 10.1016/j.mee.2004.03.061
- language
- English
- LU publication?
- yes
- id
- 60fb51a9-2e2b-479d-a091-af7a150a7757 (old id 274500)
- date added to LUP
- 2016-04-01 11:42:53
- date last changed
- 2022-03-12 23:39:24
@article{60fb51a9-2e2b-479d-a091-af7a150a7757, abstract = {{Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.}}, author = {{Beck, Marc and Persson, F and Carlberg, Patrick and Graczyk, Mariusz and Maximov, Ivan and Ling, TGI and Montelius, Lars}}, issn = {{1873-5568}}, keywords = {{transducer; nanoimprint lithography; sensor; redox cycling; interdigitated array electrode}}, language = {{eng}}, pages = {{837--842}}, publisher = {{Elsevier}}, series = {{Microelectronic Engineering}}, title = {{Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography}}, url = {{http://dx.doi.org/10.1016/j.mee.2004.03.061}}, doi = {{10.1016/j.mee.2004.03.061}}, volume = {{73-74}}, year = {{2004}}, }