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Metal-assisted chemical etching and electroless deposition for fabrication of hard X-ray Pd/Si zone plates

Akan, Rabia ; Frisk, Thomas ; Lundberg, Fabian ; Ohlin, Hanna ; Johansson, Ulf LU ; Li, Kenan ; Sakdinawat, Anne and Vogt, Ulrich (2020) In Micromachines 11(3).
Abstract

Zone plates are diffractive optics commonly used in X-ray microscopes. Here, we present a wet-chemical approach for fabricating high aspect ratio Pd/Si zone plate optics aimed at the hard X-ray regime. A Si zone plate mold is fabricated via metal-assisted chemical etching (MACE) and further metalized with Pd via electroless deposition (ELD). MACE results in vertical Si zones with high aspect ratios. The observed MACE rate with our zone plate design is 700 nm/min. The ELD metallization yields a Pd density of 10.7 g/cm3, a value slightly lower than the theoretical density of 12 g/cm3. Fabricated zone plates have a grid design, 1:1 line-to-space-ratio, 30 nm outermost zone width, and an aspect ratio of 30:1. At 9 keV... (More)

Zone plates are diffractive optics commonly used in X-ray microscopes. Here, we present a wet-chemical approach for fabricating high aspect ratio Pd/Si zone plate optics aimed at the hard X-ray regime. A Si zone plate mold is fabricated via metal-assisted chemical etching (MACE) and further metalized with Pd via electroless deposition (ELD). MACE results in vertical Si zones with high aspect ratios. The observed MACE rate with our zone plate design is 700 nm/min. The ELD metallization yields a Pd density of 10.7 g/cm3, a value slightly lower than the theoretical density of 12 g/cm3. Fabricated zone plates have a grid design, 1:1 line-to-space-ratio, 30 nm outermost zone width, and an aspect ratio of 30:1. At 9 keV X-ray energy, the zone plate device shows a first order diffraction efficiency of 1.9%, measured at the MAX IV NanoMAX beamline. With this work, the possibility is opened to fabricate X-ray zone plates with low-cost etching and metallization methods.

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author
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organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Electroless deposition, High aspect ratio nanostructures, Metal-assisted chemical etching, X-ray diffractive optics, Zone plate
in
Micromachines
volume
11
issue
3
article number
301
publisher
MDPI AG
external identifiers
  • scopus:85082883683
  • pmid:32183040
ISSN
2072-666X
DOI
10.3390/mi11030301
language
English
LU publication?
yes
id
5cbb3449-67b6-4d57-9636-1efc5c8daa3c
date added to LUP
2020-12-30 13:17:26
date last changed
2024-06-27 04:48:28
@article{5cbb3449-67b6-4d57-9636-1efc5c8daa3c,
  abstract     = {{<p>Zone plates are diffractive optics commonly used in X-ray microscopes. Here, we present a wet-chemical approach for fabricating high aspect ratio Pd/Si zone plate optics aimed at the hard X-ray regime. A Si zone plate mold is fabricated via metal-assisted chemical etching (MACE) and further metalized with Pd via electroless deposition (ELD). MACE results in vertical Si zones with high aspect ratios. The observed MACE rate with our zone plate design is 700 nm/min. The ELD metallization yields a Pd density of 10.7 g/cm<sup>3</sup>, a value slightly lower than the theoretical density of 12 g/cm<sup>3</sup>. Fabricated zone plates have a grid design, 1:1 line-to-space-ratio, 30 nm outermost zone width, and an aspect ratio of 30:1. At 9 keV X-ray energy, the zone plate device shows a first order diffraction efficiency of 1.9%, measured at the MAX IV NanoMAX beamline. With this work, the possibility is opened to fabricate X-ray zone plates with low-cost etching and metallization methods.</p>}},
  author       = {{Akan, Rabia and Frisk, Thomas and Lundberg, Fabian and Ohlin, Hanna and Johansson, Ulf and Li, Kenan and Sakdinawat, Anne and Vogt, Ulrich}},
  issn         = {{2072-666X}},
  keywords     = {{Electroless deposition; High aspect ratio nanostructures; Metal-assisted chemical etching; X-ray diffractive optics; Zone plate}},
  language     = {{eng}},
  number       = {{3}},
  publisher    = {{MDPI AG}},
  series       = {{Micromachines}},
  title        = {{Metal-assisted chemical etching and electroless deposition for fabrication of hard X-ray Pd/Si zone plates}},
  url          = {{http://dx.doi.org/10.3390/mi11030301}},
  doi          = {{10.3390/mi11030301}},
  volume       = {{11}},
  year         = {{2020}},
}