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Planar refractive lenses made of SiC for high intensity nanofocusing

Lyubomirskiy, Mikhail ; Schurink, Bart ; Makhotkin, Igor A. ; Brueckner, Dennis ; Wittwer, Felix ; Kahnt, Maik LU orcid ; Seyrich, Martin ; Seiboth, Frank ; Bijkerk, Fred and Schroer, Christian G. (2021) In Optics Express 29(9). p.14025-14032
Abstract
We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm x 275 nm has been achieved with a lens working distance of 29 mm.
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author
; ; ; ; ; ; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Hard x rays, Planar lenses, Synchrotron radiation, X ray diffraction, X ray microscopy, X ray optics
in
Optics Express
volume
29
issue
9
pages
8 pages
publisher
Optical Society of America
external identifiers
  • scopus:85105077232
  • pmid:33985128
ISSN
1094-4087
DOI
10.1364/OE.416223
language
English
LU publication?
yes
id
02d998c5-d1b2-4900-b9b5-c6682c725d27
date added to LUP
2021-05-03 10:08:23
date last changed
2023-11-23 02:11:19
@article{02d998c5-d1b2-4900-b9b5-c6682c725d27,
  abstract     = {{We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm x 275 nm has been achieved with a lens working distance of 29 mm.}},
  author       = {{Lyubomirskiy, Mikhail and Schurink, Bart and Makhotkin, Igor A. and Brueckner, Dennis and Wittwer, Felix and Kahnt, Maik and Seyrich, Martin and Seiboth, Frank and Bijkerk, Fred and Schroer, Christian G.}},
  issn         = {{1094-4087}},
  keywords     = {{Hard x rays; Planar lenses; Synchrotron radiation; X ray diffraction; X ray microscopy; X ray optics}},
  language     = {{eng}},
  month        = {{04}},
  number       = {{9}},
  pages        = {{14025--14032}},
  publisher    = {{Optical Society of America}},
  series       = {{Optics Express}},
  title        = {{Planar refractive lenses made of SiC for high intensity nanofocusing}},
  url          = {{http://dx.doi.org/10.1364/OE.416223}},
  doi          = {{10.1364/OE.416223}},
  volume       = {{29}},
  year         = {{2021}},
}