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Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Beck, Marc LU ; Persson, F; Carlberg, Patrick LU ; Graczyk, Mariusz LU ; Maximov, Ivan LU ; Ling, TGI and Montelius, Lars LU (2004) In Microelectronic Engineering 73-74. p.837-842
Abstract
Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
transducer, nanoimprint lithography, sensor, redox cycling, interdigitated array electrode
in
Microelectronic Engineering
volume
73-74
pages
837 - 842
publisher
Elsevier
external identifiers
  • wos:000222145400149
  • scopus:2542442954
ISSN
1873-5568
DOI
10.1016/j.mee.2004.03.061
language
English
LU publication?
yes
id
60fb51a9-2e2b-479d-a091-af7a150a7757 (old id 274500)
date added to LUP
2007-10-16 16:49:48
date last changed
2017-01-01 04:28:15
@article{60fb51a9-2e2b-479d-a091-af7a150a7757,
  abstract     = {Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.},
  author       = {Beck, Marc and Persson, F and Carlberg, Patrick and Graczyk, Mariusz and Maximov, Ivan and Ling, TGI and Montelius, Lars},
  issn         = {1873-5568},
  keyword      = {transducer,nanoimprint lithography,sensor,redox cycling,interdigitated array electrode},
  language     = {eng},
  pages        = {837--842},
  publisher    = {Elsevier},
  series       = {Microelectronic Engineering},
  title        = {Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography},
  url          = {http://dx.doi.org/10.1016/j.mee.2004.03.061},
  volume       = {73-74},
  year         = {2004},
}