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Compositional analysis of oxide-embedded III-V nanostructures

Ek, Martin LU orcid ; Petersson, Leon LU ; Wallentin, Jesper LU ; Wahlqvist, David LU ; Ahadi, Aylin LU ; Borgström, Magnus LU and Wallenberg, Reine LU (2022) In Nanotechnology 33(37).
Abstract

Nanowire growth enables creation of embedded heterostructures, where one material is completely surrounded by another. Through materials-selective post-growth oxidation it is also possible to combine amorphous oxides and crystalline, e.g. III-V materials. Such oxide-embedded structures pose a challenge for compositional characterization through transmission electron microscopy since the materials will overlap in projection. Furthermore, materials electrically isolated by an embedding oxide are more sensitive to electron beam-induced alterations. Methods that can directly isolate the embedded material, preferably at reduced electron doses, will be required in this situation. Here, we analyse the performance of two such techniques-local... (More)

Nanowire growth enables creation of embedded heterostructures, where one material is completely surrounded by another. Through materials-selective post-growth oxidation it is also possible to combine amorphous oxides and crystalline, e.g. III-V materials. Such oxide-embedded structures pose a challenge for compositional characterization through transmission electron microscopy since the materials will overlap in projection. Furthermore, materials electrically isolated by an embedding oxide are more sensitive to electron beam-induced alterations. Methods that can directly isolate the embedded material, preferably at reduced electron doses, will be required in this situation. Here, we analyse the performance of two such techniques-local lattice parameter measurements from high resolution micrographs and bulk plasmon energy measurements from electron energy loss spectra-by applying them to analyse InP-AlInP segments embedded in amorphous aluminium oxide. We demonstrate the complementarity of the two methods, which show an overall excellent agreement. However, in regions with residual strain, which we analyse through molecular dynamics simulations, the two techniques diverge from the true value in opposite directions.

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author
; ; ; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
EELS, III–V materials, strain, transmission electron microscopy
in
Nanotechnology
volume
33
issue
37
publisher
IOP Publishing
external identifiers
  • scopus:85133102662
  • pmid:35667366
ISSN
0957-4484
DOI
10.1088/1361-6528/ac75fa
language
English
LU publication?
yes
additional info
Publisher Copyright: Creative Commons Attribution license.
id
29d897c7-a22f-4d69-8301-a744736b68e7
date added to LUP
2022-07-08 21:03:08
date last changed
2024-05-30 17:07:27
@article{29d897c7-a22f-4d69-8301-a744736b68e7,
  abstract     = {{<p>Nanowire growth enables creation of embedded heterostructures, where one material is completely surrounded by another. Through materials-selective post-growth oxidation it is also possible to combine amorphous oxides and crystalline, e.g. III-V materials. Such oxide-embedded structures pose a challenge for compositional characterization through transmission electron microscopy since the materials will overlap in projection. Furthermore, materials electrically isolated by an embedding oxide are more sensitive to electron beam-induced alterations. Methods that can directly isolate the embedded material, preferably at reduced electron doses, will be required in this situation. Here, we analyse the performance of two such techniques-local lattice parameter measurements from high resolution micrographs and bulk plasmon energy measurements from electron energy loss spectra-by applying them to analyse InP-AlInP segments embedded in amorphous aluminium oxide. We demonstrate the complementarity of the two methods, which show an overall excellent agreement. However, in regions with residual strain, which we analyse through molecular dynamics simulations, the two techniques diverge from the true value in opposite directions.</p>}},
  author       = {{Ek, Martin and Petersson, Leon and Wallentin, Jesper and Wahlqvist, David and Ahadi, Aylin and Borgström, Magnus and Wallenberg, Reine}},
  issn         = {{0957-4484}},
  keywords     = {{EELS; III–V materials; strain; transmission electron microscopy}},
  language     = {{eng}},
  month        = {{06}},
  number       = {{37}},
  publisher    = {{IOP Publishing}},
  series       = {{Nanotechnology}},
  title        = {{Compositional analysis of oxide-embedded III-V nanostructures}},
  url          = {{http://dx.doi.org/10.1088/1361-6528/ac75fa}},
  doi          = {{10.1088/1361-6528/ac75fa}},
  volume       = {{33}},
  year         = {{2022}},
}