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Control and Estimation in Force Feedback Sensors

Åström, Karl Johan LU (2011) Workshop on Dynamics and Control of Microscale and Nanoscale Systems 413. p.219-233
Abstract
The principle of force feedback is to design a sensor as a feedback system where the action of the measured variable is compensated by a force generated by feedback. Force feedback has contributed significantly to improve the quality of sensors. A characteristic feature of MEMS devices is that they are subject to random disturbances, such as Brownian motion, Johnson-Nyquist noise, and tunneling noise. Variations in device parameters must also be accounted for. In this paper we will discuss principles for designing control and estimation algorithms for instruments based on MEMS devices with force feedback. The fact that the final goal is to design an instrument gives an interesting formulation of the problem. It is shown that shaping of the... (More)
The principle of force feedback is to design a sensor as a feedback system where the action of the measured variable is compensated by a force generated by feedback. Force feedback has contributed significantly to improve the quality of sensors. A characteristic feature of MEMS devices is that they are subject to random disturbances, such as Brownian motion, Johnson-Nyquist noise, and tunneling noise. Variations in device parameters must also be accounted for. In this paper we will discuss principles for designing control and estimation algorithms for instruments based on MEMS devices with force feedback. The fact that the final goal is to design an instrument gives an interesting formulation of the problem. It is shown that shaping of the frequency response can be separated from attenuation of disturbance. The principles have been applied to design of a tunneling accelerometer. The experimental work was done at Professor Turner's laboratory at the University of California, Santa Barbara. (Less)
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
host publication
Control Technologies for Emerging Micro and Nanoscale Systems (Lecture Notes in Control and Information Sciences)
editor
Eleftheriou, Evangelos and Moheimani, S. O. Reza
volume
413
pages
219 - 233
publisher
Springer
conference name
Workshop on Dynamics and Control of Microscale and Nanoscale Systems
conference location
Zurich, Switzerland
conference dates
2009-12-10 - 2009-12-11
external identifiers
  • wos:000307082900013
  • scopus:79960938056
ISSN
0170-8643
ISBN
978-3-642-22172-9
DOI
10.1007/978-3-642-22173-6_13
language
English
LU publication?
yes
id
e421a163-c864-48ff-981e-fb1c033ad180 (old id 3470432)
date added to LUP
2016-04-01 14:43:34
date last changed
2025-04-04 14:46:35
@inproceedings{e421a163-c864-48ff-981e-fb1c033ad180,
  abstract     = {{The principle of force feedback is to design a sensor as a feedback system where the action of the measured variable is compensated by a force generated by feedback. Force feedback has contributed significantly to improve the quality of sensors. A characteristic feature of MEMS devices is that they are subject to random disturbances, such as Brownian motion, Johnson-Nyquist noise, and tunneling noise. Variations in device parameters must also be accounted for. In this paper we will discuss principles for designing control and estimation algorithms for instruments based on MEMS devices with force feedback. The fact that the final goal is to design an instrument gives an interesting formulation of the problem. It is shown that shaping of the frequency response can be separated from attenuation of disturbance. The principles have been applied to design of a tunneling accelerometer. The experimental work was done at Professor Turner's laboratory at the University of California, Santa Barbara.}},
  author       = {{Åström, Karl Johan}},
  booktitle    = {{Control Technologies for Emerging Micro and Nanoscale Systems (Lecture Notes in Control and Information Sciences)}},
  editor       = {{Eleftheriou, Evangelos and Moheimani, S. O. Reza}},
  isbn         = {{978-3-642-22172-9}},
  issn         = {{0170-8643}},
  language     = {{eng}},
  pages        = {{219--233}},
  publisher    = {{Springer}},
  title        = {{Control and Estimation in Force Feedback Sensors}},
  url          = {{http://dx.doi.org/10.1007/978-3-642-22173-6_13}},
  doi          = {{10.1007/978-3-642-22173-6_13}},
  volume       = {{413}},
  year         = {{2011}},
}