Quantitative characterization of aberrations in x-ray optics
(2016) Conferene on Advances in X-Ray/EUV Optics and Components XI 9963.- Abstract
Due to the weak interaction of X-rays with matter and their small wavelength on the atomic scale, stringent requirements are put on X-ray optics manufacturing and metrology. As a result, these optics often suffer from aberrations. Until now, X-ray optics were mainly characterized by their focal spot size and efficiency. How- ever, both measures provide only insufficient information about optics quality. Here, we present a quantitative analysis of residual aberrations in current beryllium compound refractive lenses using ptychography followed by a determination of the wavefront error and subsequent Zernike polynomial decomposition. Known from visible light optics, we show that these measures can provide an adequate tool to determine and... (More)
Due to the weak interaction of X-rays with matter and their small wavelength on the atomic scale, stringent requirements are put on X-ray optics manufacturing and metrology. As a result, these optics often suffer from aberrations. Until now, X-ray optics were mainly characterized by their focal spot size and efficiency. How- ever, both measures provide only insufficient information about optics quality. Here, we present a quantitative analysis of residual aberrations in current beryllium compound refractive lenses using ptychography followed by a determination of the wavefront error and subsequent Zernike polynomial decomposition. Known from visible light optics, we show that these measures can provide an adequate tool to determine and compare the quality of various X-ray optics.
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- author
- Seiboth, Frank ; Kahnt, Maik LU ; Scholz, Maria ; Seyrich, Martin ; Wittwer, Felix ; Garrevoet, Jan ; Falkenberg, Gerald ; Schropp, Andreas and Schroer, Christian G.
- publishing date
- 2016-01-01
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- keywords
- aberrations, Beam characterization, compound refractive X-ray lenses, hard X-ray nanobeam, ptychography, Zernike polynomials
- host publication
- Advances in X-Ray/EUV Optics and Components XI
- editor
- Morawe, Christian ; Khounsary, Ali M. and Goto, Shunji
- volume
- 9963
- article number
- 99630P
- publisher
- SPIE
- conference name
- Conferene on Advances in X-Ray/EUV Optics and Components XI
- conference location
- San Diego, United States
- conference dates
- 2016-08-31 - 2016-09-01
- external identifiers
-
- scopus:85010756904
- ISBN
- 9781510603172
- DOI
- 10.1117/12.2237646
- language
- English
- LU publication?
- no
- id
- 34b1843f-bfe9-4e49-946f-d6a6dc8e104f
- date added to LUP
- 2019-10-12 12:54:28
- date last changed
- 2023-10-21 21:43:58
@inproceedings{34b1843f-bfe9-4e49-946f-d6a6dc8e104f, abstract = {{<p>Due to the weak interaction of X-rays with matter and their small wavelength on the atomic scale, stringent requirements are put on X-ray optics manufacturing and metrology. As a result, these optics often suffer from aberrations. Until now, X-ray optics were mainly characterized by their focal spot size and efficiency. How- ever, both measures provide only insufficient information about optics quality. Here, we present a quantitative analysis of residual aberrations in current beryllium compound refractive lenses using ptychography followed by a determination of the wavefront error and subsequent Zernike polynomial decomposition. Known from visible light optics, we show that these measures can provide an adequate tool to determine and compare the quality of various X-ray optics.</p>}}, author = {{Seiboth, Frank and Kahnt, Maik and Scholz, Maria and Seyrich, Martin and Wittwer, Felix and Garrevoet, Jan and Falkenberg, Gerald and Schropp, Andreas and Schroer, Christian G.}}, booktitle = {{Advances in X-Ray/EUV Optics and Components XI}}, editor = {{Morawe, Christian and Khounsary, Ali M. and Goto, Shunji}}, isbn = {{9781510603172}}, keywords = {{aberrations; Beam characterization; compound refractive X-ray lenses; hard X-ray nanobeam; ptychography; Zernike polynomials}}, language = {{eng}}, month = {{01}}, publisher = {{SPIE}}, title = {{Quantitative characterization of aberrations in x-ray optics}}, url = {{http://dx.doi.org/10.1117/12.2237646}}, doi = {{10.1117/12.2237646}}, volume = {{9963}}, year = {{2016}}, }