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Electron channelling : challenges and opportunities for compositional analysis of nanowires by TEM

Ek, M. LU orcid ; Lehmann, Sebastian LU and Wallenberg, Reine LU (2020) In Nanotechnology 31(36).
Abstract

Energy dispersive x-ray spectroscopy in a transmission electron microscope is often the first method employed to characterize the composition of nanowires. Ideally, it should be accurate and sensitive down to fractions of an atomic percent, and quantification results are often reported as such. However, one can often get substantial errors in accuracy even though the precision is high: for nanowires it is common for the quantified V/III atomic ratios to differ noticeably from 1. Here we analyse the origin of this systematic error in accuracy for quantification of the composition of III-V nanowires. By varying the electron illumination direction, we find electron channelling to be the primary cause, being responsible for errors in... (More)

Energy dispersive x-ray spectroscopy in a transmission electron microscope is often the first method employed to characterize the composition of nanowires. Ideally, it should be accurate and sensitive down to fractions of an atomic percent, and quantification results are often reported as such. However, one can often get substantial errors in accuracy even though the precision is high: for nanowires it is common for the quantified V/III atomic ratios to differ noticeably from 1. Here we analyse the origin of this systematic error in accuracy for quantification of the composition of III-V nanowires. By varying the electron illumination direction, we find electron channelling to be the primary cause, being responsible for errors in quantified V/III atomic ratio of 50%. Knowing the source of the systematic errors is required for applying appropriate corrections. Lastly, we show how channelling effects can provide information on the crystallographic position of dopants.

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Please use this url to cite or link to this publication:
author
; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
in
Nanotechnology
volume
31
issue
36
article number
364005
publisher
IOP Publishing
external identifiers
  • scopus:85087110897
  • pmid:32454471
ISSN
0957-4484
DOI
10.1088/1361-6528/ab9679
language
English
LU publication?
yes
id
4c265574-2ed6-438d-8578-ccae1fa149fe
date added to LUP
2020-07-07 09:43:23
date last changed
2024-04-03 10:09:12
@article{4c265574-2ed6-438d-8578-ccae1fa149fe,
  abstract     = {{<p>Energy dispersive x-ray spectroscopy in a transmission electron microscope is often the first method employed to characterize the composition of nanowires. Ideally, it should be accurate and sensitive down to fractions of an atomic percent, and quantification results are often reported as such. However, one can often get substantial errors in accuracy even though the precision is high: for nanowires it is common for the quantified V/III atomic ratios to differ noticeably from 1. Here we analyse the origin of this systematic error in accuracy for quantification of the composition of III-V nanowires. By varying the electron illumination direction, we find electron channelling to be the primary cause, being responsible for errors in quantified V/III atomic ratio of 50%. Knowing the source of the systematic errors is required for applying appropriate corrections. Lastly, we show how channelling effects can provide information on the crystallographic position of dopants.</p>}},
  author       = {{Ek, M. and Lehmann, Sebastian and Wallenberg, Reine}},
  issn         = {{0957-4484}},
  language     = {{eng}},
  number       = {{36}},
  publisher    = {{IOP Publishing}},
  series       = {{Nanotechnology}},
  title        = {{Electron channelling : challenges and opportunities for compositional analysis of nanowires by TEM}},
  url          = {{http://dx.doi.org/10.1088/1361-6528/ab9679}},
  doi          = {{10.1088/1361-6528/ab9679}},
  volume       = {{31}},
  year         = {{2020}},
}