Design and Modeling of a High-Speed AFM-Scanner
(2007) In IEEE Transactions on Control Systems Technology 15(5). p.906-915- Abstract
- A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new... (More)
- A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3049577
- author
- Schitter, Georg ; Åström, Karl Johan LU ; DeMartini, Barry E. ; Thurner, Philipp J. ; Turner, Kimberly L. and Hansma, Paul K.
- organization
- publishing date
- 2007
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- Atomic force microscopy, fast scanning, mechatronics, nanotechnology, precision positioning, real time imaging
- in
- IEEE Transactions on Control Systems Technology
- volume
- 15
- issue
- 5
- pages
- 906 - 915
- publisher
- IEEE - Institute of Electrical and Electronics Engineers Inc.
- external identifiers
-
- scopus:38849136027
- ISSN
- 1558-0865
- DOI
- 10.1109/TCST.2007.902953
- language
- English
- LU publication?
- yes
- id
- 4d962b0a-79eb-463c-bd92-1ca3dc893bc3 (old id 3049577)
- date added to LUP
- 2016-04-04 14:36:40
- date last changed
- 2022-04-16 08:09:30
@article{4d962b0a-79eb-463c-bd92-1ca3dc893bc3, abstract = {{A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.}}, author = {{Schitter, Georg and Åström, Karl Johan and DeMartini, Barry E. and Thurner, Philipp J. and Turner, Kimberly L. and Hansma, Paul K.}}, issn = {{1558-0865}}, keywords = {{Atomic force microscopy; fast scanning; mechatronics; nanotechnology; precision positioning; real time imaging}}, language = {{eng}}, number = {{5}}, pages = {{906--915}}, publisher = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}}, series = {{IEEE Transactions on Control Systems Technology}}, title = {{Design and Modeling of a High-Speed AFM-Scanner}}, url = {{http://dx.doi.org/10.1109/TCST.2007.902953}}, doi = {{10.1109/TCST.2007.902953}}, volume = {{15}}, year = {{2007}}, }